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Advancing FIB assisted 3D EBSD using a static sample setup

Abstract : A new setup for automatic 3D EBSD data collection in static mode has been developed using a conventional FIB-SEM system. This setup requires no stage or sample movements between the FIB milling and EBSD mapping. Its capabilities were tested experimentally on a coherent twin boundary of an IN-CONEL sample. Our result demonstrates that this static setup holds many advantages in terms of data throughput and quality as compared with other ones requiring stage/sample movements. The most important advantages are the better slice alignment and an improved orientation precision in 3D space, both being prerequisite for a reliable grain boundary characterization.
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https://hal.univ-lorraine.fr/hal-01515195
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Julien Guyon, Nathalie Gey, Daniel Goran, Smail Chalal, Fabian Perez-Willard. Advancing FIB assisted 3D EBSD using a static sample setup. Ultramicroscopy, Elsevier, 2016, 161, pp.161-167. ⟨10.1016/j.ultramic.2015.11.011⟩. ⟨hal-01515195⟩

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