Packageless SAW Devices with Isolated Layer Acoustic Waves (ILAW) and Waveguiding Layer Acoustic Waves (WLAW), IEEE Freq. Control. Symp, pp.135-140, 2007. ,
DOI : 10.1109/freq.2007.4319049
ZnO thin-film SAW devices, IEEE Trans. Son. Ultrason, vol.27, pp.369-379, 1980. ,
DOI : 10.1109/t-su.1980.31201
Effect of RF power on optical and electrical properties of ZnO thin film by magnetron sputtering, Materials chemistry and Physics, vol.72, issue.3, pp.269-272, 2001. ,
, Synthetic Metals, vol.148, pp.37-41, 2005.
Stabilized Surface Acoustic Wave Device, 1981. ,
Review of SAW Oscillator performance, IEEE Ultrason. Symp, vol.43, pp.43-54, 1994. ,
Vacuum Encapsulation for Surface Acoustic Wave (SAW) Device, 1980. ,
AlN/ZnO/Diamond Structure Combining Isolated and Surface Acoustic Waves, Appl. Phys. Lett, vol.95, pp.233503-233506, 2009. ,
URL : https://hal.archives-ouvertes.fr/hal-00475886
Packageless AlN/ZnO/Si Structure for SAW Devices Applications, IEEE Sensors Journal, vol.13, pp.487-491, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-01283888
AlN material constants evaluation and SAW properties on A1N/A1203 and AlN/Si, IEEE Ultrason. Symp, pp.375-380, 1981. ,
The Elastic constants of sputtered aluminium Nitride Films, IEEE Ultrason. Symp, pp.353-356, 1995. ,
Acoustic investigation of the elastic properties of ZnO films, Appl. phys. Lett, vol.51, pp.1889-1891, 1987. ,