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, NH 2 (amide II) shoulder 1620 cm ?1
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Ar =1050 sccm, O 2 = 100 sccm, Ar =30 sccm, APTES = 0.13 sccm) Supplemental material 5: Deconvolution of absorption bands between 1800 and 800 cm ?1 for nanoparticles grown in an APTES-Ar-O 2 afterglow ,
, = 250 W, flowrates: Ar =1050 sccm, O 2 = 100 sccm, Ar =30 sccm, APTES = 0.13 70%. (P = 15 mbar, W = 250 W, flowrates: Ar =1050 sccm