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, Table 2: Vibrational groups and their corresponding frequencies observed in the APTES flow with (bold) and without Ar-O 2 afterglow

, NH 2 (amide II) shoulder 1620 cm ?1

, Main vibrational groups and their corresponding frequencies observed in nanoparticles produced from APTES for different duty cycles, vol.3

W. and F. , Ar =1050 sccm, O 2 = 100 sccm, Ar =30 sccm, APTES = 0.13 sccm) Supplemental material 5: Deconvolution of absorption bands between 1800 and 800 cm ?1 for nanoparticles grown in an APTES-Ar-O 2 afterglow

, = 250 W, flowrates: Ar =1050 sccm, O 2 = 100 sccm, Ar =30 sccm, APTES = 0.13 70%. (P = 15 mbar, W = 250 W, flowrates: Ar =1050 sccm