Abstract : A dual rotating compensators ellipsometer has been developed. It is based on the optical PC1SC2A configuration, where C1 and C2 are the synchronized continuously rotating compensators [1]. The systematic errors if the compensators are quarter-wave plates have been already studied [2]. Smith [3] has demonstrated that the optimum retardance of a dual-rotating-retarder (DRR) instrument must be equal to 127° compared to the quarter-wave (90°) retarders generally used.
https://hal.univ-lorraine.fr/hal-02901802
Contributor : Laurent Broch <>
Submitted on : Friday, July 17, 2020 - 3:24:06 PM Last modification on : Thursday, July 23, 2020 - 3:20:35 AM Long-term archiving on: : Tuesday, December 1, 2020 - 12:22:05 AM
L. Broch, A Naciri, L. Johann. Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual rotating compensators. ICSE-V, 2010, Albany, United States. 2010. ⟨hal-02901802⟩