En ce qui concernent lesétudeslesétudes sur la sensibilitésensibilitéà l'effet de masse des dispositifsàdispositifsà ondes de Love, nous avons déjà cité dans la partie précédente les travaux Ces deuxéquipesdeuxéquipes comparent leurs résultats théoriques et expérimentaux pour un effet de masse réalisé respectivement par le dépôt d'un film de Langmuir-Blodgett et par des??lotsdes?des??lots d'or. On peut y ajouter les travaux de Kovacs [?] quí etudie la sensibilitésensibilitéà l'effet de masse due au dépôt d'un film mince de résine photosensible. ToujoursàToujoursà propos de la structure Quartz ST-90?/SiO 2 , on peut mentionner les travaux de Harding [?] quí etudient la sensibilité du capteur en fonction de l'emplacement du film d'or, Très peu de travaux présentent des résultats de détection de gaz ou d'espèces chimiques ainsi que de Du ,
une autre couche guidante a ´ eté exploitée par l'´ equipe de Kalantar-Zadeh, 2002. ,
elle offrait un meilleur coefficient de couplagé electromécanique K 2 et une sensibilitésensibilitéà l'effet de masse plusélevéeplusélevée qu'avec la structure Quartz ST-90?/SiO 2 classiquement utilisée. La sensibilitésensibilitéà l'effet de masse a ´ eté mesurée par un dépôt de films d'or et de résine photosensible entre les transducteurs interdigités. Les sensibilités obtenues sont du même ordre pour les deux types de films (or et résine), ce qui tendàtendà penser qu'il s ,
SiO 2 est de 400 cm 2 /g contre 950 cm 2 /g avec la structure Quartz ST-90?/ZnO. La structure avec le ZnO est donc, au maximum, un peu plus de deux fois plus sensible qu'avec le SiO 2 . Ce maximum est atteint dans les deux cas pour uné epaisseur normalisée h ,
Une configurationàconfigurationà deux lignesàlignesà retard dont l'une servant de référence permet de s'affranchir des effets de température Cette configuration est très répandue pour l'utilisation des capteursàcapteursà Numerical development of ZnO/Quartz Love wave structure for gas contamination detection, IEEE Sensors Journal, vol.7, pp.3-3, 2007. ,
Theoretical, Numerical and Experimental Investigations of Gas Vapour Effects on a ZnO/Quartz SAW Gas Sensor, Ferroelectrics, vol.351, issue.1, pp.225-235, 2006. ,
DOI : 10.1109/PROC.1976.10180
FEM modelling of surface acoustic wave in diamond layered structure, physica status solidi (a), vol.16, issue.12, pp.3179-3184, 2006. ,
DOI : 10.1109/58.464826
ZnO films analysis for Love wave gas sensor applications, Sensors and Actuators B ,
Theoretical approach and experimental results to design a ZnO/quartz Love wave gas sensor, IEEE Sensors Journal ,
Zero TCF ZnO/quartz SAW structure for gas sensing applications, Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004., pp.542-545, 2004. ,
DOI : 10.1109/FREQ.2004.1418515
Theoretical, numerical and experimental investigations of gas vapours effects on a ZnO/Quartz SAW gas sensor, 8th European Conference on Applications of Polar Dielectrics, 2006. ,
ZnO thin films deposition for surface acoustic wave appliactions, MRS 2006 Spring Meeting, 2006. ,
FEM modeling of diamond based SAW devices " , Surface and Bulk Defects in CVD Diamond Films XI, 2006. ,
Theoretical approach and experimental results for ZnO/quartz Love wave gas sensors, Eurosensors XIX, 2005. ,
une onde de Stoneley Ondes de Love Les ondes de Love de polarisation transverse horizontale se propagent dans une structure constituée d'un substrat piézoélectrique et d'une couche mince isotropes. L'onde générée dans le substrat peutêtrepeutêtre coupléè a la couchè a condition que la vitesse de l'onde de volume transverse dans la couche soit inférieurè a celle du substrat. L'onde est alors guidée dans la couche, c'est pourquoi on parle de couche guidante. L'´ energie de l'onde est ainsi principalement confinée dans cettedernì ere ,
Scales of solute hydrogen-bonding : their construction and application to physicochemical and biochemical process, Chem. Soc. Rev, issue.22, pp.73-83, 1993. ,
SAW and Pseudo-SAW Properties Using Matrix Methods, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.41, pp.876-882, 1994. ,
Dynamic behavior of ultra-thin polymer films deposited on surface acoustical wave devices. Sensor and Actuators, pp.234-241, 1999. ,
Polyaniline thin films for gas sensing, Sensors and Actuators B: Chemical, vol.28, issue.3, pp.173-179, 1995. ,
DOI : 10.1016/0925-4005(95)01725-9
Etude de dispositifsàdispositifsà ondes acoustiques de surface (SAW) ` a structure multicouche AlN/Diamant, croissance de matériaux en couches minces et technologie de réalisation, 2001. ,
Acoustic field and waves in solids, 1990. ,
Characterization of ozone sensors based on WO reactively sputtered films: influence of O concentration in the sputtering gas, and working temperature, Sensors and Actuators B: Chemical, vol.100, issue.3, pp.320-324, 2004. ,
DOI : 10.1016/j.snb.2004.01.023
Methane sensitivity of Fe-doped SnO 2 thick films, Sensors and Actuators B, vol.105, pp.346-350, 2005. ,
Theoretical determination of the pseudo surface acoustic wave characteristic parameters, IEEE 1991 Ultrasonics Symposium, pp.353-358, 1991. ,
DOI : 10.1109/ULTSYM.1991.234185
Piezoelectric quartz crystal biosensors, Talanta, vol.46, issue.6, pp.1223-1236, 1998. ,
DOI : 10.1016/S0039-9140(97)00392-5
Contactless surface acoustic wave gas sensor, Sensors and Actuators, issue.76, pp.103-106, 1999. ,
Acousitc wave sensors -Theory, design and physico-chemical applications, 1997. ,
Humidity and temperature compensation in work function gas sensor FETs, Sensors and Actuators B: Chemical, vol.93, issue.1-3, pp.271-275, 2003. ,
DOI : 10.1016/S0925-4005(03)00232-6
K/sup +/ detection using shear horizontal acoustic modes, IEEE Symposium on Ultrasonics, pp.383-387, 1990. ,
DOI : 10.1109/ULTSYM.1990.171392
A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves, IEEE Transactions on Sonics and Ultrasonics, vol.15, issue.4, pp.209-217, 1968. ,
DOI : 10.1109/T-SU.1968.29477
The principle and applications of piezoelctric crystal sensors, Materials Sciences and Engineering C, issue.12, pp.111-123, 2000. ,
A model for the responses of Nb 2 O 5 sensors to CO and NH 3 gases, Sensors and Actuators B, vol.43, pp.60-64, 1997. ,
Acoustic wave gas sensors, Sensors and Actuators B: Chemical, vol.59, issue.2-3, pp.146-153, 1999. ,
DOI : 10.1016/S0925-4005(99)00212-9
An investigation of the dependence of ZnO film on the sensitivity of Love mode sensor in ZnO/quartz structure Extended investigation on High Velocity Pseudo Surface Waves, Pereira da Cunha and E.L. Adler. High velocity Pseudo Surface Waves (HVP- SAW). IEEE Ultrasonics SymposiumS, pp.133-139604, 1994. ,
An experimental study of Love-wave acoustic sensors operating in liquids, Sensors and Actuators A: Physical, vol.60, issue.1-3, pp.54-61, 1997. ,
DOI : 10.1016/S0924-4247(96)01424-0
A study of Love-wave acoustic sensors, Sensors and Actuators A, issue.56, pp.211-219, 1996. ,
Elaboration and characterization of tin oxide???lanthanum oxide mixed layers prepared by the electrostatic spray pyrolysis technique, Sensors and Actuators B: Chemical, vol.78, issue.1-3, pp.98-105, 2001. ,
DOI : 10.1016/S0925-4005(01)00797-3
Thin-film piezoelectric acoustic sensors. Application to detection of hydrocarbons, Sensors and Actuators B, issue.44, pp.488-494, 1997. ,
Mass sensitivity of SH-APM sensors : potentialities for organophosphorous vapors detection, Sensors and Actuators B, issue.68, pp.244-248, 2000. ,
Etude théorique et expérimentale de dispositifsàdispositifsà ondesélastiquesondesélastiques de surface (O.E.S) ` a base des structures multicouches : ZnO/Quartz, AlN/Diamant et ZnO/AlN/Diamant, 2005. ,
Transformation of tensor constants of anisotropic materials due to rotation of co-ordinate axes, Proceedings of the Institution of Electrical Engineers, pp.591-592, 1975. ,
Effect of crystalline quality of diamond film to the propagation loss of surface acoustic wave devices, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.52, issue.10, pp.1817-1822, 2005. ,
DOI : 10.1109/TUFFC.2005.1561637
A SAW immunosensor for operation in liquid using a sio 2 protective layer, Sensors and Actuators B, issue.76, pp.147-151, 2001. ,
Sensitivity of the acoustic waveguide biosensor to protein binding as a function of the waveguide properties, Biosensors and Bioelectronics, issue.18, pp.1399-1406, 2003. ,
A novel Love-plate acoustic sensor utilizing polymer overlayers, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.39, issue.5, pp.131-137, 1992. ,
DOI : 10.1109/58.156185
Elaboration and characterization of SnO2???Mn2O3 thin layers prepared by electrostatic spray deposition, Sensors and Actuators B: Chemical, vol.47, issue.1-3, pp.189-193, 1998. ,
DOI : 10.1016/S0925-4005(98)00022-7
Detection of supported lipid layers with the acoustic Love waveguide device: application to biosensors, Sensors and Actuators B: Chemical, vol.34, issue.1-3, pp.295-300, 1996. ,
DOI : 10.1016/S0925-4005(96)01837-0
Elastic contants of sputtered ZnO films, IEEE Ultrasonics Symposium, pp.295-299, 1987. ,
Surface acoustic wave microsensors and applications, Smart Materials and Structures, vol.6, issue.6, 1997. ,
DOI : 10.1088/0964-1726/6/6/002
Mass sensitivity of Love-mode acoustic sensors incorporating silicon dioxide and silicon-oxyfluoride guiding layers, Sensors and Actuators A, issue.88, pp.20-28, 2001. ,
Love wave acoustic immunosensor operating in liquid, Sensors and Actuators A, issue.61, pp.279-286, 1997. ,
Nonlinear Properties of Surface Acoustic Waves: Applications to Oscillators and Sensors, IEEE Transactions on Sonics and Ultrasonics, vol.28, issue.5, pp.342-348, 1981. ,
DOI : 10.1109/T-SU.1981.31272
Development of high sensitivity ethanol gas sensors based on Pt-doped SnO 2 surfaces, Sensors and Actuators B, vol.99, pp.201-206, 20047. ,
A novel molecularly imprinted thin film applied to a Love wave gas sensor, Sensors and Actuators A: Physical, vol.76, issue.1-3, pp.93-97, 1999. ,
DOI : 10.1016/S0924-4247(98)00357-4
Bilayer strucure for hydrogen detection in a surface acoustic wave sensor system. Sensor and Actuators, pp.265-271, 2002. ,
Viscosity sensing using a Love-wave device, Sensors and Actuators A: Physical, vol.68, issue.1-3, pp.275-281, 1998. ,
DOI : 10.1016/S0924-4247(98)00017-X
Combination of zinc film and quartz to realize large coupling factor and excellent temperature coefficient for SAW devices, IEEE Ultrasonics Symposium, pp.261-266, 1997. ,
Surface acoustic wave characteristics of a zno/quartz substrate structure having a large electromechanical coupling factor and a small temperature coefficient, Journal of Applied Physics, vol.36, pp.3076-3080, 1997. ,
Sensitivity enhancement for CO gas detection using a SnO 2 -CeO 2 -PdO x system, Sensors and Actuators B, vol.107, pp.825-830, 2005. ,
Piezoelectric sorption detector, Anal. Chem, issue.36, pp.1735-1739, 1964. ,
Small and low loss IF SAW filters with excellent temperature coeffcient consisting of zinc oxide film on quartz substrate, IEEE Ultrasonics Symposium, pp.167-171, 2002. ,
Love waves for (bio)chemical sensing in liquids, IEEE Ultrasonics Symposium, pp.281-285, 1992. ,
Harmonic frequency analysis of resonator chemical sensors : application to the detection of carbon dioxide and humidity, Sensors and Actuators B, issue.50, pp.110-116, 1998. ,
Identification of eletrcolyte solutions using a shear horizontal surface acoustic wave sensor with a liquid-flow system, Sensors and Actuators B, issue.91, pp.309-315, 2003. ,
Comparison of layered based SAW sensors, Sensors and Actuators B, issue.91, pp.303-308, 2003. ,
A novel Lovemode device based on ZnO/ST cut quartz crystal structure for sensing applications, Sensors and Actuators A, issue.100, pp.135-143, 2002. ,
Novel Love mode surface acoustic wave based immunosensors, Sensors and Actuators B, issue.91, pp.143-147, 2003. ,
Love Mode SAW Sensors with ZnO layer Operating in Gas and Liquid Media, IEEE International Frequency Control Symposium and PDA Exhibition, pp.268-272, 2002. ,
Piezoelectric biosensors: recent advances and applications, Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218), pp.419-429, 2001. ,
DOI : 10.1109/FREQ.2001.956265
Etude et réalisation de résonateursrésonateursà ondes acoustiques de volume (FBAR) montés sur miroir acoustique et exploitant le mode de cisaillement dans les couches minces d'oxyde de zinc (ZnO) ` a axe c incliné : application aux capteurs gravimétriques en milieux liquides, 2006. ,
Fullerene C60-cryptand coated surface acoustic wave quartz crystal sensor for organic vapors, Sensors and Actuators B: Chemical, vol.92, issue.3, pp.243-254, 2003. ,
DOI : 10.1016/S0925-4005(03)00159-X
FEM modelling of surface acoustic wave in diamond layered structure, physica status solidi (a), vol.16, issue.12, pp.3179-3184, 2006. ,
DOI : 10.1109/58.464826
GasFET for the detection of reducing gases, Sensors and Actuators B, pp.111-112106, 2005. ,
Solid-state amperometric hydrogen sensor based on polymer electrolyte membrane fuel cell, Sensors and Actuators B: Chemical, vol.107, issue.2, pp.812-817, 2005. ,
DOI : 10.1016/j.snb.2004.12.022
ZnO films analysis for Love wave gas sensor applications, Sensors and Actuators B ,
Numerical development of ZnO/Quartz Love wave structure for gas contamination detection, IEEE Sensors Journal, vol.7, issue.3, pp.336-341, 2007. ,
Theoretical approach and experimental results to design a ZnO/quartz Love wave gas sensor, IEEE Sensors Journal ,
A solid-state potentiometric sensor for hydrogen detection in air, Sensors and Actuators B: Chemical, vol.98, issue.1, pp.73-76, 2004. ,
DOI : 10.1016/j.snb.2003.09.024
Optical biosniffer for methyl mercaptan in halitosis, Analytica Chimica Acta, pp.573-57475, 2006. ,
Theoretical mass sensitivity of Love wave and layer guided acoustic plate mode sensors, Journal of Applied Physics, vol.79, issue.2, pp.9701-9710, 2002. ,
DOI : 10.1063/1.1420776
Sensitive NO2 detection with surface acoustic wave devices using a cyclic measuring technique, Sensors and Actuators B: Chemical, vol.68, issue.1-3, pp.69-73, 2000. ,
DOI : 10.1016/S0925-4005(00)00463-9
Saw gas detection using Langmuir-Blodgett polypyrole films, Thin solid films, pp.327-329694, 1998. ,
Characterization of SH acoustic plate mode liquid sensors, Sensors and Actuators, vol.20, issue.3, pp.253-268, 1989. ,
DOI : 10.1016/0250-6874(89)80124-6
Reproducible fabrication of an array of gas-sensitive chemo-resistors with commercially available polyaniline, Sensors and Actuators B, vol.68, pp.331-334, 2000. ,
Polyaniline as a new sensitive layer for gas sensors, Analytica Chimica Acta, vol.475, issue.1-2, pp.1-15, 2003. ,
DOI : 10.1016/S0003-2670(02)01229-1
Plasma polymerized polyaniline used as sensitive layer for gas sensors. ISPC-17 proceedings, 2005. ,
Experimental study of Love wave devices with thick guiding layers, Sensors and Actuators A: Physical, vol.109, issue.3, pp.180-185, 2004. ,
DOI : 10.1016/j.sna.2003.10.034
Theoretical, Numerical and Experimental Investigations of Gas Vapour Effects on a ZnO/Quartz SAW Gas Sensor, Ferroelectrics, vol.351, issue.1, pp.225-235, 2006. ,
DOI : 10.1109/PROC.1976.10180
Characteristic nonlinear responses for gas species on the surface of different semiconductor gas sensors, Applied Surface Science, vol.135, issue.1-4, pp.285-292, 1998. ,
DOI : 10.1016/S0169-4332(98)00290-6
Detection of a sample gas in the presence of an interferent gas based on a nonlinear dynamic response, Sensors and Actuators B, issue.56, pp.79-84, 1999. ,
The mass-loading sensitivity of acoustic love wave biosensors in air ,
Strucutral properties of ZnO thin films prepared by RF magnetron sputtering Surface acoustic wave properties in ZnO-SiO 2 - Si layered structure Wave Electronics A Layered SAW Device Based on ZnO/litao 3 for Liquid Media Sensing Applications [PMYM + 00 Influence of Al, In, Cu, Fe and Sn dopants on the response of thin film ZnO gas sensor to ethanol vapour Thin Solid Films Zinc oxide ceramic semi-conductor gas sensor for ethanol vapour Hydrogen sensitivity of SnO 2 thin films doped with Pt by laser ablation A Lovewave biosensor using nucleic acids as ligands The improved ammonia gas sensors constructed by L-glutamic acid hydrochloride on surface acoustic wave devices Adhesives : a new class of polymer coatings for surface acoustic wave sensors for fast and reliable process control applications Theoretical considerations on the design of a miniaturised paramagnetic oxygen sensor Viscoelastic properties of polymer films on surface acoustic wave organophophorous vapor sensors, Properties of RF magnetron sputtered zinc oxide thin films Comparaison of Surface Transverse Wave (STW) and Shear Horizontal Acoustic Plate Mode (SHAPM) devices for biochemical sensors. IEEE International Frequency Control Symposium, pp.130-13568, 1935. ,
Sensibilité des dispositifsàdispositifsà ondesélastiquesondesélastiques de surface aux déformations mécaniques : application au capteur de pression, 2003. ,
Real time device for biosensing : design of a bacteriophage model using love acoustic waves, Biosensors and Bioelectronics, issue.18, pp.755-763, 2003. ,
Platinum and palladium high-temperature transducers on langasite, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol.52, issue.4, pp.545-549, 2005. ,
Paramagnetic oxygen measurement using an optical-fiber microphone, Sensors and Actuators B: Chemical, vol.73, issue.2-3, pp.211-215, 2001. ,
DOI : 10.1016/S0925-4005(00)00694-8
A perturbation analysis of the attenuation and dispersion of surface waves, Journal of Applied Physics, vol.21, issue.1, pp.87-95, 1978. ,
DOI : 10.1121/1.1912249
Temperature dependence of the resonant frequency of electroded doubly???rotated quartz thickness???mode resonators, Journal of Applied Physics, vol.16, issue.12, pp.8038-8051, 1979. ,
DOI : 10.1063/1.1661322
Zero TCF ZnO/quartz SAW structure for gas sensing applications, Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004., pp.542-545, 2004. ,
DOI : 10.1109/FREQ.2004.1418515
SnO2:Ga thin films as oxygen gas sensor, Materials Science and Engineering: B, vol.110, issue.3, pp.268-271, 2004. ,
DOI : 10.1016/j.mseb.2004.02.013
Optical fiber ammonia sensing probes using reagent immobilized porous silica coating as transducers, Sensors and Actuators B: Chemical, vol.115, issue.1, pp.158-163, 2006. ,
DOI : 10.1016/j.snb.2005.08.034
Ieee trans. on ultrasonics, ferroelectrics and frequency control, pp.157-161, 1987. ,
Selectivity improvement of semi-conducting gas sensors by selective filter for atmospheric pollutants detection, Materials Science and Engineering C, vol.26, pp.186-195, 2006. ,
Surface acoustic wave probe for chemical analysis, Analytical chemistry, issue.51, pp.1458-1475, 1979. ,
Etch rates for micromachining processing-part II, Journal of Microelectromechanical Systems, vol.12, issue.6, pp.761-778, 2003. ,
DOI : 10.1109/JMEMS.2003.820936
Inductively coupled, polymer coated surface acoustic wave sensor for organic vapors, Sensors and Actuators B: Chemical, vol.76, issue.1-3, pp.58-63, 2001. ,
DOI : 10.1016/S0925-4005(01)00568-8
Electrochemistry of planar solid-state amperometric devices based on Nafion?? and polybenzimidazole solid polymer electrolytes, Electrochimica Acta, vol.46, issue.10-11, pp.1523-1532, 2001. ,
DOI : 10.1016/S0013-4686(00)00748-9
Estimation of components and concentration in mixture solutions of electrolytes using a liquid-flow system with sh-saw sensor, Sensors and Actuators A, issue.83, pp.34-39, 2000. ,
Gas sensing mechanism of TiO 2 -based thin films, Vacuum, vol.74, pp.335-338, 2004. ,
Conception, réalisation etétudeetétude de micro-capteursàcapteursà ondes de Love pour applications en milieux gazeux. Cas de la détection de composés organophosphorés, 2002. ,
Acoustic waves in piezoelectric plates bordered with viscous and conductive liquid, Ultrasonics, vol.39, issue.1, pp.245-250, 2001. ,
DOI : 10.1016/S0041-624X(00)00040-8
A love-wave gaz sensor coated with functionalized polysiloxane for sensing organophosphorus compounds, Sensors and Actuators B, issue.76, pp.86-94, 2001. ,
90?) constitue la partie génératrice d'ondes de Love et la polyaniline, polymère fonctionnalisable est utilisée en tant que couche sensible. La structure génératrice d'ondes a ´ etéentì erement réalisée en salle blanche avec notamment l'optimisation des paramètres de dépôt du film de ZnO par pulvérisation réactive RF magnétron et la photolithographie des IDTs. Elle a ensuité etéetéétudiée et caractérisée, avant et après dépôt de la couche sensible, par des mesures expérimentales confrontées aux estimations théoriques. Pour finir, nous avons procédéprocédéà des tests sous gaz (NO2, SO2 etéthanoletéthanol) avec notre capteur ,