Les surfaces solides : concepts et méthodes, CNRS édition, 2005. ,
One-Dimensional Dislocations. I. Static Theory, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.198, issue.1053, pp.205-216, 1949. ,
DOI : 10.1098/rspa.1949.0095
Kinetik Der Phasen Bildung, 1939. ,
The development of grain structure during growth of metallic films, Acta Metallurgica, vol.32, issue.5, pp.773-781, 1983. ,
DOI : 10.1016/0001-6160(84)90150-0
High Rate Thick Film Growth, Annual Review of Materials Science, vol.7, issue.1, pp.239-260, 1977. ,
DOI : 10.1146/annurev.ms.07.080177.001323
Thin film materials, stress defects formation and surface evolution, 2003. ,
Thin film solid, pp.308-309, 1997. ,
Thin film solid, pp.202-208, 1998. ,
Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films, Journal of Materials Research, vol.41, issue.06, pp.1553-1563, 1992. ,
DOI : 10.1080/14786445008561154
Measurement of residual stresses in a plate using bulging test and a dynamic technique: application to electroplated nickel coatings, Materials Science and Engineering: A, vol.288, issue.2, pp.160-163, 2000. ,
DOI : 10.1016/S0921-5093(00)00845-5
URL : https://hal.archives-ouvertes.fr/hal-00008627
Nanoindentation of single-crystalline gold thin films: Correlating hardness and the onset of plasticity, Acta Materialia, vol.56, issue.15, pp.3887-3899, 2008. ,
DOI : 10.1016/j.actamat.2008.04.032
Thin Solid Films. 469-470, pp.221-226, 2004. ,
Measuring the Mechanical Properties of Thin Metal Films by Means of Bulge Testing of Micromachined Windows, MRS Proceedings, vol.356, pp.579-584, 1995. ,
DOI : 10.1063/1.1735751
Journal of Mechanics and Physics Solids, Acta Materiala, vol.44, issue.517, pp.657-673, 2003. ,
Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension, Journal of the Mechanics and Physics of Solids, vol.52, issue.3, pp.667-685, 2004. ,
DOI : 10.1016/j.jmps.2003.07.001
Les joints de grains de la théorie à l'ingénierie, Paris. EDP sciences, 2006. ,
Mechanical properties of thin films, Metallurgical Transactions A, vol.130, issue.11, pp.2217-2245, 1989. ,
DOI : 10.1557/PROC-130-93
The Stability of a Dislocation Threading a Strained Layer on a Substrate, Journal of Applied Mechanics, vol.54, issue.3, pp.553-564, 1987. ,
DOI : 10.1115/1.3173068
Accomodation of misfit between single-crystal films of nickel and copper, Thin Solid Films, vol.5, issue.3, pp.187-198, 1970. ,
DOI : 10.1016/0040-6090(70)90076-3
Theory of dislocations, 1968. ,
Phyical review, pp.722-723, 1950. ,
On the validity of the hall-petch relationship in nanocrystalline materials, Scripta Metallurgica, vol.23, issue.10, p.1679, 1989. ,
DOI : 10.1016/0036-9748(89)90342-6
Hall-petch relation in nanocrystalline solids, Scripta Metallurgica et Materialia, vol.25, issue.4, pp.955-958, 1991. ,
DOI : 10.1016/0956-716X(91)90256-Z
Materials Science and Engineering : A. 319-321, pp.16-23, 2001. ,
Hall-Petch strengthening in nanocrystalline metals, Materials Science and Engineering: A, vol.166, issue.1-2, pp.161-167, 1993. ,
DOI : 10.1016/0921-5093(93)90319-A
On the hardening and softening of nanocrystalline materials, Nanostructured Materials, vol.3, issue.1-6, pp.379-384, 1993. ,
DOI : 10.1016/0965-9773(93)90102-H
Thin solid film, pp.176-181, 2003. ,
URL : https://hal.archives-ouvertes.fr/hal-01655573
On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation, Journal of Materials Research, vol.26, issue.03, pp.613-617, 1992. ,
DOI : 10.1016/0020-7683(87)90116-8
The Tension of Metallic Films Deposited by Electrolysis, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.82, issue.553, pp.172-175, 1909. ,
DOI : 10.1098/rspa.1909.0021
The role of the sample shape and size on the internal stress induced curvature of thin-film substrate systems, International Journal of Solids and Structures, vol.41, issue.18-19, pp.5143-5154, 2004. ,
DOI : 10.1016/j.ijsolstr.2004.03.015
Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers, Acta Materialia, vol.48, issue.12, pp.3261-3269, 2000. ,
DOI : 10.1016/S1359-6454(00)00128-2
Tensile behavior of free-standing gold films. Part I. Coarse-grained films, Acta Materialia, vol.51, issue.7, pp.2067-2078, 2003. ,
DOI : 10.1016/S1359-6454(03)00006-5
Tensile behavior of free-standing gold films. Part II. Fine-grained films, Acta Materialia, vol.51, issue.7, pp.2079-2087, 2003. ,
DOI : 10.1016/S1359-6454(03)00007-7
Journal of the Mechanics and Physics of solids, pp.619-638, 2005. ,
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films, Journal of Materials Research, vol.9, issue.12, pp.3242-3249, 1992. ,
DOI : 10.1063/1.1708831
Thin film mechanics -bulging and stretching, 2000. ,
Bulge and Blister Testing of Thin Films and Their Interfaces ,
Optimisation des circuits passifs micro-ondes suspendus sur membrane diélectrique, Thèse, 2005. ,
Mise en ??uvre de deux m??thodes interf??rom??triques pour la caract??risation m??canique des films minces par l'essai de gonflement. Applications au cas du silicium monocristallin, Journal de Physique III, vol.5, issue.7, pp.953-983, 1995. ,
DOI : 10.1051/jp3:1995169
High-temperature bulge-test setup for mechanical testing of free-standing thin films, Review of Scientific Instruments, vol.74, issue.3, pp.1383-1386, 2003. ,
DOI : 10.1557/PROC-265-3
Etch rates and morphology of silicon (h k l) surfaces etched in KOH and KOH saturated with isopropanol solutions, Sensors and Actuators A: Physical, vol.115, issue.2-3, pp.549-556, 2004. ,
DOI : 10.1016/j.sna.2003.11.010
Caractérisation et modélisation de couches minces 3C-SiC sur Si pour applications aux microsystèmes en environnement sévères, 2000. ,
Rochester Institute of Technology ,
Smart materials and Structures, pp.1135-1144, 2001. ,
Détemination des contraintes résiduelles dans les revêtement par diffraction des Rayons X en faible incidence, 2006. ,
Thin Solid Films, pp.469-470, 2004. ,
Caractérisation expérimentale des matériaux II. Lausanne, ère éd ,
Thin Solid Films, pp.290-291, 1996. ,
Mechanical stress in thin film microstructures on silicon substrate, Vacuum, vol.80, issue.1-3, pp.236-240, 2008. ,
DOI : 10.1016/j.vacuum.2005.08.001
Characterisation of silicon carbide and silicon nitride thin films and Si3N4/SiC multilayers, Diamond and Related Materials, vol.11, issue.3-6, pp.1248-1253, 2002. ,
DOI : 10.1016/S0925-9635(01)00622-7
Mechanical property measurements of thin films using load-deflection of composite rectangular membranes, Sensors and Actuators, vol.20, issue.1-2, pp.135-141, 1989. ,
DOI : 10.1016/0250-6874(89)87111-2
Effect of peak load on the determination of hardness and Young's modulus of hot-pressed Si3N4 by nanoindentation, Materials Science and Engineering: A, vol.354, issue.1-2, pp.140-145, 2003. ,
DOI : 10.1016/S0921-5093(02)00940-1
Solid State Phénomena, pp.156-158, 2010. ,
Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension, Journal of the Mechanics and Physics of Solids, vol.52, issue.3, pp.667-689, 2004. ,
DOI : 10.1016/j.jmps.2003.07.001
Applied Physic Letters, pp.2673-2675, 2001. ,
Zeitschrift für Mathematik und Physik, pp.311-317, 1915. ,
Theory of plates and shells, 1959208209. ,