U. Kreibig and M. Vollmer, Optical properties of metal clusters, 1995.
DOI : 10.1007/978-3-662-09109-8

J. Meier, H. Keppner, S. Dubail, U. Droll, P. Torres et al., Microcrystalline Single-Junction and Micromorph Tandem Thin Film Silicon Solar Cells, MRS Proceedings, vol.420, pp.139-144, 1998.
DOI : 10.1016/S0927-0248(97)00173-6

G. Mie, Beiträge zur Optik trüber Medien, speziell kolloidaler Metallösungen, Ann. Phys, vol.25, pp.377-452, 1908.
DOI : 10.1002/andp.19083300302

S. Nie and S. R. Emory, Probing Single Molecules and Single Nanoparticles by Surface-Enhanced Raman Scattering, Science, vol.275, issue.5303, pp.1102-1106, 1997.
DOI : 10.1126/science.275.5303.1102

S. Pillai, K. R. Catchpole, T. Trupke, G. Zhang, J. Zhao et al., Enhanced emission from Si-based light-emitting diodes using surface plasmons, Applied Physics Letters, vol.88, issue.16, p.161102, 2006.
DOI : 10.1364/JOSAA.18.002577

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, Surface plasmon enhanced silicon solar cells, Journal of Applied Physics, vol.101, issue.9, p.93105, 2007.
DOI : 10.1088/0022-3719/15/18/012

R. B. Peumans, P. Forrest, and S. R. , Long-range absorption enhancement in organic tandem thin-film solar cells containing silver nanoclusters, J. Appl. Phys, vol.96, pp.7519-7526, 2004.

D. M. Schaadt, B. Feng, and E. T. Yu, Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles, Applied Physics Letters, vol.86, issue.6, p.63106, 2005.
DOI : 10.1016/S0927-0248(99)00100-2

A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner, Photovoltaic Technology: The Case for Thin-Film Solar Cells, Science, vol.285, issue.5428, pp.692-698, 1999.
DOI : 10.1126/science.285.5428.692

J. Springer, B. Rech, W. Reetz, J. Müller, and M. Vanecek, Light trapping and optical losses in microcrystalline silicon pin solar cells deposited on surface-textured glass/ZnO substrates, Solar Energy Materials and Solar Cells, vol.85, pp.1-11, 2005.
DOI : 10.1016/j.solmat.2004.02.020

O. Stenzel, A. Stendal, K. Voigtsberger, and C. Von-borczyskowski, Enhancement of the photovoltaic conversion efficiency of copper phthalocyanine thin film devices by incorporation of metal clusters, Solar Energy Materials and Solar Cells, vol.37, issue.3-4, pp.337-348, 1995.
DOI : 10.1016/0927-0248(95)00027-5

H. R. Stuart and D. G. Hall, Island size effects in nanoparticle-enhanced photodetectors, Applied Physics Letters, vol.73, issue.26, pp.3815-3817, 1998.
DOI : 10.1103/PhysRevLett.80.5663

M. A. Van-dijk, A. L. Tchebotareva, M. Orrit, M. Lippitz, S. Berciaud et al., Absorption and scattering microscopy of single metal nanoparticles, Physical Chemistry Chemical Physics, vol.13, issue.30, pp.3486-3495, 2006.
DOI : 10.1103/PhysRevB.61.16956

URL : https://hal.archives-ouvertes.fr/hal-00143921

N. W. Ashcroft and N. D. Mermin, Solid State Physics, 1981.

C. F. Bohren and D. R. Huffman, Absorption and Scattering of light by small particles, 1983.
DOI : 10.1002/9783527618156

D. Fatti, N. Vallée, F. Flytzanis, C. Hamanaka, Y. Nakamura et al., Electron dynamics and surface plasmon resonance nonlinearities in metal nanoparticles, Chemical Physics, vol.251, issue.1-3, pp.215-226, 2000.
DOI : 10.1016/S0301-0104(99)00304-3

P. Drude, Zur Elektronentheorie der Metalle, Annalen der Physik, vol.1, pp.566-613, 1900.

H. Ehrenreich and H. R. Philipp, Optical Properties of Ag and Cu, Physical Review, vol.76, issue.4, pp.1622-1629, 1962.
DOI : 10.1088/0370-1328/76/5/301

H. Hovel, S. Fritz, A. Hilger, U. Kreibig, and M. Vollmer, Width of cluster plasmon resonances: Bulk dielectric functions and chemical interface damping, Physical Review B, vol.35, issue.24, pp.18178-18188, 1993.
DOI : 10.1016/S0022-3697(74)80146-0

J. D. Jackson, Classical Electrodynamics, 1999.

M. Kaveh and N. Wiser, Electron-electron scattering in conducting materials, Advances in Physics, vol.38, issue.4, pp.257-372, 1984.
DOI : 10.1088/0305-4608/13/12/015

N. Beck, J. Meier, J. Fric, Z. Remes, A. Poruba et al., Enhanced optical absorption in microcrystalline silicon, Journal of Non-Crystalline Solids, vol.198, issue.200, pp.903-906, 1996.
DOI : 10.1016/0022-3093(96)00080-4

C. Beneking, B. Rech, T. Eickhoff, Y. G. Michael, N. Schultz et al., Preparation and Light Stability of a-Si/a-Si Stacked Solar Cells, Proceedings of the 12 th EC PVSEC, pp.683-686, 1994.

T. Brammer and H. Stiebig, Defect density and recombination lifetime in microcrystalline silicon absorbers of highly efficient thin-film solar cells determined by numerical device simulations, Journal of Applied Physics, vol.266, issue.2, pp.1035-1042, 2003.
DOI : 10.1016/S0022-3093(99)00907-2

R. Carius, F. Finger, U. Backhausen, M. Luysberg, P. Hapke et al., Electronic Properties of Microcrystalline Silicon, MRS Proceedings, vol.467, pp.283-294, 1997.
DOI : 10.1557/PROC-467-283

B. Chapman, Glow Discharge Processes, 1980.

K. L. Chopra, S. Major, and D. K. Pandya, Transparent conductors???A status review, Thin Solid Films, vol.102, issue.1, pp.1-46, 1983.
DOI : 10.1016/0040-6090(83)90256-0

F. Diehl, B. Schröder, and H. Oechsner, Light scattering and enhanced optical absorption in hot wire microcrystalline silicon, Journal of Applied Physics, vol.84, issue.6, pp.3416-3418, 1998.
DOI : 10.1063/1.94278

J. R. Doyle, D. A. Doughty, and A. Gallagher, Silane dissociation products in deposition discharges, Journal of Applied Physics, vol.38, issue.9, pp.4375-4384, 1990.
DOI : 10.1063/1.345188

F. Finger, O. Vetterl, R. Carius, A. Lambertz, C. Scholten et al., Microcrystalline silicon solar cells: relationship between material properties and device performance, Proceedings of the Eleventh International School of Condensed Matter Physics, 2000.

A. Gallagher, J. Doyle, and D. Doughty, Plasma Chemistry in Silane and Silane-Germane Discharge Deposition, MRS Proceedings, vol.68, pp.23-31, 1989.
DOI : 10.1063/1.341461

M. A. Green, Solar Cells, Operating Principles, Technology and System Applications, 1982.

R. Gupta, M. J. Dyer, and W. A. Weimer, Preparation and characterization of surface plasmon resonance tunable gold and silver films, Journal of Applied Physics, vol.13, issue.9, pp.5264-5271, 2002.
DOI : 10.1021/jp002906x

R. A. Haefer, Oberflächen ? und Dünnschicht ? Technologie Teil 1, Beschichtungen von Oberflächen, 1987.

L. Houben, M. Luysberg, P. Hapke, R. Carius, F. Finger et al., Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth, Philosophical Magazine A, vol.118, issue.6, pp.1447-1460, 1998.
DOI : 10.1103/PhysRevB.36.3344

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Density of gap states of silicon grain boundaries determined by optical absorption, Applied Physics Letters, vol.2, issue.2, pp.195-197, 1983.
DOI : 10.1016/0379-6787(80)90035-6

W. B. Jackson, S. M. Kelso, C. C. Tsai, J. W. Allen, and S. J. Oh, Energy dependence of the optical matrix element in hydrogenated amorphous and crystalline silicon, Physical Review B, vol.22, issue.60, pp.5187-5198, 1985.
DOI : 10.1080/14786437008221061

O. Kluth, Präparation und Charakterisierung von texturierten Metalloxid Schichten für Dünschichtsolarzellen, 1996.

O. Kluth, A. Löffel, S. Wieder, C. Beneking, W. Appenzeller et al., Texture etched Al-doped ZnO: a new material for enhanced light trapping in thin film solar cells, Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference, 1997, pp.715-718, 1997.
DOI : 10.1109/PVSC.1997.654189

M. Kubon, E. Böhmer, F. Siebke, B. Rech, C. Beneking et al., Solution of the ZnO/p Contact Problem in a-Si:H based Solar Cells, Solar Energy Materials, vol.41, issue.2, pp.485-492, 1996.

M. Luysberg, P. Hapke, R. Carius, and F. Finger, Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies, Philosophical Magazine A, vol.63, issue.1, pp.31-47, 1997.
DOI : 10.1116/1.575806

J. Perrin, Plasma and surface reactions during a-Si:H film growth, Journal of Non-Crystalline Solids, vol.137, issue.138, pp.138-639, 1991.
DOI : 10.1016/S0022-3093(05)80202-9

B. Rech and H. Wagner, Potential of amorphous silicon for solar cells, Applied Physics A: Materials Science & Processing, vol.69, issue.2, pp.155-167, 1999.
DOI : 10.1007/s003390050986

H. Sakai and Y. Ichikawa, Process Technology for a-Si/a-Si Double Stacked Tandem Solar Cells with Stabilized 10-percent Efficiency, J. of non-Crystalline Solids, vol.137, pp.1155-1160, 1991.

A. Sauvain, A. Shah, and J. Hubin, Measurement of ambipolar mobility-lifetime product and its significance for amorphous silicon solar cells, Proceedings of the 21 st IEEE Photovoltaic Specialist Conference, pp.1560-1563, 1990.

D. L. Staebler and C. R. Wronski, Reversible conductivity changes in discharge???produced amorphous Si, Applied Physics Letters, vol.1, issue.4, pp.292-294, 1977.
DOI : 10.1109/T-ED.1977.18740

H. Stiebig, A. Kreisel, K. Winz, N. Schultz, C. Beneking et al., Spectral response modelling of a-Si:H solar cells using accurate light absorption profiles, Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion, WCPEC (A Joint Conference of PVSC, PVSEC and PSEC), pp.603-606, 1994.
DOI : 10.1109/WCPEC.1994.520033

M. Tzolov, F. Finger, R. Carius, and P. Hapke, Optical and transport studies on thin microcrystalline silicon films prepared by very high frequency glow discharge for solar cell applications, Journal of Applied Physics, vol.336, issue.11, pp.7376-7385, 1997.
DOI : 10.1557/PROC-336-511

S. Vep?ek, F. A. Sarott, S. Rambert, and E. Taglauer, Surface hydrogen content and passivation of silicon deposited by plasma induced chemical vapor deposition from silan and the implications for the reaction mechanism, J. of Vacuum Science & Technology A7, pp.2614-2624, 1989.

O. Vetterl, F. Finger, R. Carius, P. Hapke, L. Houben et al., Intrinsic microcrystalline silicon: A new material for photovoltaics, Solar Energy Materials and Solar Cells, vol.62, issue.1-2, pp.97-108, 2000.
DOI : 10.1016/S0927-0248(99)00140-3

J. C. Vossen, Transparent Conducting Films, Physics of Thin films, vol.9, pp.1-71, 1977.

S. Wieder, Amorphous Silicon Solar Cells, Comparison of p-i-n and n-i-p Structures with Zinc-Oxide Frontcontact, 1999.

J. A. Willemen, Modelling of Amorphous Silicon Single-and Multi-Junction Solar Cells, 1998.

K. Winz, B. Rech, T. Eickhoff, C. Beneking, C. M. Fortmann et al., Optoelectronic Properties of Thin Amorphous and Micro-Crystalline p-Type Films Developed for Amorphous Silicon-Based Solar Cells, MRS Proceedings, vol.148, pp.819-824, 1996.
DOI : 10.1557/PROC-149-99

M. G. Albrecht and J. A. Creighton, Anomalously intense Raman spectra of pyridine at a silver electrode, Journal of the American Chemical Society, vol.99, issue.15, pp.5215-5219, 1977.
DOI : 10.1021/ja00457a071

A. Campion and P. Kambhampati, Surface-enhanced Raman scattering, Chemical Society Reviews, vol.172, issue.4, pp.241-250, 1998.
DOI : 10.1039/a827241z

M. Cardona, Light Scattering in Solids, 1982.

R. K. Chang and T. E. Furtak, Surface Enhanced Raman Scattering, 1982.
DOI : 10.1007/978-1-4615-9257-0

URL : https://hal.archives-ouvertes.fr/jpa-00223517

D. L. Jeanmaire and R. P. Van-duyne, Surface Raman spectroelectrochemistry .1. heterocyclic, aromatic, and aliphatic-amines adsorbed on anodized silver electrode, J. of Electroanalytical Chemistry, vol.84, pp.1-20, 1977.

K. Kneipp, Y. Wang, H. Kneipp, L. T. Perelman, I. Itzkan et al., Single Molecule Detection Using Surface-Enhanced Raman Scattering (SERS), Physical Review Letters, vol.46, issue.9, pp.1667-1670, 1997.
DOI : 10.1103/PhysRevB.46.2821

K. Kneipp, H. Kneipp, I. Itzkan, R. R. Dasari, and M. S. Feld, Surface-enhanced Raman scattering and biophysics, Journal of Physics: Condensed Matter, vol.14, issue.18, pp.597-624, 2002.
DOI : 10.1088/0953-8984/14/18/202

R. Kobliska and S. Solin, Raman Spectrum of Wurtzite Silicon, Physical Review B, vol.26, issue.8, pp.3799-3802, 1973.
DOI : 10.1103/PhysRevLett.26.642

P. C. Lee and D. Meisel, Adsorption and surface-enhanced Raman of dyes on silver and gold sols, The Journal of Physical Chemistry, vol.86, issue.17, pp.3391-3395, 1982.
DOI : 10.1021/j100214a025

D. A. Long, RAMAN SPECTROSCOPY, 1977.
DOI : 10.1016/B978-0-408-70145-7.50015-6

M. Moskovits, Surface-enhanced Raman spectroscopy: a brief retrospective, Journal of Raman Spectroscopy, vol.69, issue.6-7, pp.485-496, 2005.
DOI : 10.1007/BFb0109600

M. Moskovits, Surface-Enhanced Raman Spectroscopy: a Brief Perspective, Surface- Enhanced Raman Scattering: Physics and Applications, pp.1-17, 2006.
DOI : 10.1007/3-540-33567-6_1

S. Nie and S. R. Emory, Probing Single Molecules and Single Nanoparticles by Surface-Enhanced Raman Scattering, Science, vol.275, issue.5303, pp.1102-1106, 1997.
DOI : 10.1126/science.275.5303.1102

H. Richter, Z. P. Wang, and L. Ley, The one phonon Raman spectrum in microcrystalline silicon, Solid State Communications, vol.39, issue.5, pp.625-629, 1981.
DOI : 10.1016/0038-1098(81)90337-9

E. Smith and G. Dent, Modern Raman Spectroscopy: A Practical Approach, 2005.
DOI : 10.1002/0470011831

J. Sukmanowski, C. Paulick, O. Sohr, K. Andert, and F. X. Royer, Light absorption enhancement in thin silicon layers, Journal of Applied Physics, vol.34, issue.5, pp.2484-2489, 2000.
DOI : 10.1143/JPSJ.51.2575

B. Vlckova, I. Pavel, M. Sladkova, K. Siskova, and M. Slouf, Single molecule SERS: Perspectives of analytical applications, Journal of Molecular Structure, vol.834, issue.836, pp.42-47, 2007.
DOI : 10.1016/j.molstruc.2006.11.053

M. Tzolov, N. Tzenov, D. Dimova-malinovska, M. Kalitzova, C. Pizzuto et al., Vibrational properties and structure of undoped and Al-doped ZnO films deposited by RF magnetron sputtering, Thin Solid Films, vol.379, issue.1-2, pp.28-36, 2000.
DOI : 10.1016/S0040-6090(00)01413-9

C. Wen, K. Ishikawa, M. Kishima, and K. Yamada, Effects of silver particles on the photovoltaic properties of dye-sensitized TiO2 thin films, Solar Energy Materials and Solar Cells, vol.61, issue.4, pp.339-351, 2000.
DOI : 10.1016/S0927-0248(99)00117-8

M. Westphalen, U. Kreibig, J. Rostalski, H. Lüth, and D. Meissner, Metal cluster enhanced organic solar cells, Solar Energy Materials and Solar Cells, vol.61, issue.1, pp.97-105, 2000.
DOI : 10.1016/S0927-0248(99)00100-2

N. Schultz, Präparation und Charakterisierung transparenter Metalloxid-Schichten für Solarzellen aus amorphem Silizium, 1994.

C. Sönnichsen, S. Geier, N. E. Hecker, G. Von-plessen, J. Feldmann et al., Spectroscopy of single metallic nanoparticles using total internal reflection microscopy, Applied Physics Letters, vol.77, issue.19, pp.2949-2951, 2000.
DOI : 10.1002/(SICI)1521-4095(199902)11:2<149::AID-ADMA149>3.0.CO;2-W

J. Springer, A. Poruba, L. Müllerova, M. Vanecek, O. Kluth et al., Absorption loss at nanorough silver back reflector of thin-film silicon solar cells, Journal of Applied Physics, vol.37, issue.3, pp.1427-1429, 2004.
DOI : 10.1103/PhysRevB.37.3164

H. Stiebig, A. Kreisel, K. Winz, N. Schultz, C. Beneking et al., Spectral response modelling of a-Si:H solar cells using accurate light absorption profiles, Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion, WCPEC (A Joint Conference of PVSC, PVSEC and PSEC), pp.603-606, 1994.
DOI : 10.1109/WCPEC.1994.520033

S. Yoshida, M. Yoshino, S. Kitahara, K. Seki, S. Katayama et al., Si double junction solar cells by utilizing the ZnO/Ag rear contact Photovoltaic Solar Energy Conference, (1992) 590-593. µ-Si:H ou de l'a-Si:H, les nanostructures conduisent à un accroissement de l'absorption lumineuse dans le domaine du rouge et de l'infrarouge, dû à une prolongation du trajet optique résultant du phénomène de diffusionAg massif) donnent des résultats comparables. En revanche, les cellules basées sur les nanostructures d'argent souffrent d'une dégradation des propriétés électroniques, En termes de photocourant, les cellules solaires contenant les nanostructures et les cellules solaires déposées sur un substrat standard (TCO gravé au HCl Cette détérioration est plus prononcée dans le cas des cellules basées sur du µc-Si:H. Ceci peut certainement être expliqué par l'altération de la croissance de ce matériau sur les nanostructures. De ce fait, l'efficacité des deux types de cellules, en µc-Si:H et en a-Si:H, est plus faible dans le cas de cellules déposées sur des nanostructures d'argent que dans le cas de cellules basées sur un substrat standard

C. Haase and H. Stiebig, Optimized properties of thin-film silicon solar cells with grating couplers, Progress in Photovoltaics, pp.629-641, 2006.

Z. Liu, H. Wang, H. Li, and X. Wang, Red shift of plasmon resonance frequency due to the interacting Ag nanoparticles embedded in single crystal SiO2 by implantation, Applied Physics Letters, vol.57, issue.15, pp.1823-1825, 1998.
DOI : 10.1103/PhysRev.128.1622

C. Sönnichsen, S. Geier, N. E. Hecker, G. Von-plessen, J. Feldmann et al., Spectroscopy of single metallic nanoparticles using total internal reflection microscopy, Applied Physics Letters, vol.77, issue.19, pp.2949-2951, 2000.
DOI : 10.1002/(SICI)1521-4095(199902)11:2<149::AID-ADMA149>3.0.CO;2-W

C. Sönnichsen, T. Franzl, T. Wilk, G. Von-plessen, and J. Feldmann, Plasmon resonances in large noble-metal clusters, New Journal of Physics, vol.4, pp.93-94, 2002.
DOI : 10.1088/1367-2630/4/1/393

J. Springer, A. Poruba, L. Müllerova, M. Vanecek, O. Kluth et al., Absorption loss at nanorough silver back reflector of thin-film silicon solar cells, Journal of Applied Physics, vol.37, issue.3, pp.1427-1429, 2004.
DOI : 10.1103/PhysRevB.37.3164

H. Stiebig, C. Haase, C. Zahren, B. Rech, and N. Senoussaoui, Thin-film silicon solar cells with grating couplers ??? An experimental and numerical study, Journal of Non-Crystalline Solids, vol.352, issue.9-20, pp.1949-1952, 2006.
DOI : 10.1016/j.jnoncrysol.2006.01.072

H. Overhof, Fundamental concepts in the physics of amorphous semiconductors, Journal of Non-Crystalline Solids, vol.227, issue.230, pp.230-245, 1998.
DOI : 10.1016/S0022-3093(98)00020-9

D. L. Staebler and C. R. Wronski, Reversible conductivity changes in discharge???produced amorphous Si, Applied Physics Letters, vol.1, issue.4, pp.292-294, 1977.
DOI : 10.1109/T-ED.1977.18740

H. Stiebig, U. Nosan, M. Krause, M. Jankovec, and M. Topic, Dynamic properties of ultraviolet sensitive detectors, Journal of Non-Crystalline Solids, vol.338, issue.340, pp.299-302, 2002.
DOI : 10.1016/j.jnoncrysol.2004.03.088

M. Stutzmann, Weak bond-dangling bond conversion in amorphous silicon, Philosophical Magazine B, vol.56, issue.1, pp.63-70, 1987.
DOI : 10.1103/PhysRevLett.54.1836

J. Werner and M. Peisl, Exponential Band Tails at Silicon Grain Boundaries, MRS Proceedings, vol.1, pp.575-580, 1985.
DOI : 10.1016/0038-1098(82)90962-0

M. G. Albrecht and J. A. Creighton, Anomalously intense Raman spectra of pyridine at a silver electrode, Journal of the American Chemical Society, vol.99, issue.15, pp.5215-5219, 1977.
DOI : 10.1021/ja00457a071

N. W. Ashcroft and N. D. Mermin, Solid State Physics, 1981.

A. Banerjee, J. Yang, and S. Guha, Optimization of High Efficiency Amorphous Silicon Alloy based Triple-Junction Modules, MRS Proceedings, vol.336, pp.743-748, 1999.
DOI : 10.1063/1.118761

N. Beck, J. Meier, J. Fric, Z. Remes, A. Poruba et al., Enhanced optical absorption in microcrystalline silicon, Journal of Non-Crystalline Solids, vol.198, issue.200, pp.903-906, 1996.
DOI : 10.1016/0022-3093(96)00080-4

C. Beneking, B. Rech, T. Eickhoff, Y. G. Michael, N. Schultz et al., Preparation and Light Stability of a-Si/a-Si Stacked Solar Cells, Proceedings of the 12 th EC PVSEC, pp.683-686, 1994.

C. F. Bohren and D. R. Huffman, Absorption and Scattering of light by small particles, 1983.
DOI : 10.1002/9783527618156

T. Brammer and H. Stiebig, Defect density and recombination lifetime in microcrystalline silicon absorbers of highly efficient thin-film solar cells determined by numerical device simulations, Journal of Applied Physics, vol.266, issue.2, pp.1035-1042, 2003.
DOI : 10.1016/S0022-3093(99)00907-2

A. Campion and P. Kambhampati, Surface-enhanced Raman scattering, Chemical Society Reviews, vol.172, issue.4, pp.241-250, 1998.
DOI : 10.1039/a827241z

M. Cardona, Light Scattering in Solids, 1982.

R. Carius, F. Finger, U. Backhausen, M. Luysberg, P. Hapke et al., Electronic Properties of Microcrystalline Silicon, MRS Proceedings, vol.467, pp.283-294, 1997.
DOI : 10.1557/PROC-467-283

K. R. Catchpole and S. Pillai, Surface plasmons for enhanced silicon light-emitting diodes and solar cells, Journal of Luminescence, vol.121, issue.2, pp.315-318, 2006.
DOI : 10.1016/j.jlumin.2006.08.053

R. K. Chang and T. E. Furtak, Surface Enhanced Raman Scattering, 1982.
DOI : 10.1007/978-1-4615-9257-0

URL : https://hal.archives-ouvertes.fr/jpa-00223517

B. Chapman, Glow Discharge Processes, 1980.

K. L. Chopra, S. Major, and D. K. Pandya, Transparent conductors???A status review, Thin Solid Films, vol.102, issue.1, pp.1-46, 1983.
DOI : 10.1016/0040-6090(83)90256-0

C. Daboo, M. J. Baird, H. P. Hughes, N. Apsley, and M. T. Emeny, Improved surface plasmon enhanced photodetection at an Au???GaAs schottky junction using a novel molecular beam epitaxy grown Otto coupling structure, Thin Solid Films, vol.201, issue.1, pp.9-27, 1991.
DOI : 10.1016/0040-6090(91)90150-V

D. Fatti, N. Vallée, F. Flytzanis, C. Hamanaka, Y. Nakamura et al., Electron dynamics and surface plasmon resonance nonlinearities in metal nanoparticles, Chemical Physics, vol.251, issue.1-3, pp.215-226, 2000.
DOI : 10.1016/S0301-0104(99)00304-3

X. Deng and E. A. Schiff, Amorphous Silicon-Based Solar Cells, Handbook of Photovoltaic Science and Engineering from Antonio Luque and Steven Hegedus, pp.505-565, 2003.
DOI : 10.1002/0470014008.ch12

D. Derkacs, S. H. Lim, P. Matheu, W. Mar, and E. T. Yu, Improved performance of amorphous silicon solar cells via scattering from surface plasmon polaritons in nearby metallic nanoparticles, Applied Physics Letters, vol.89, issue.9, p.93103, 2006.
DOI : 10.1088/0022-3727/35/8/311

F. Diehl, B. Schröder, and H. Oechsner, Light scattering and enhanced optical absorption in hot wire microcrystalline silicon, Journal of Applied Physics, vol.84, issue.6, pp.3416-3418, 1998.
DOI : 10.1063/1.94278

Y. Dirix, C. Bastiaansen, W. Caseri, and P. Smith, Oriented Pearl-Necklace Arrays of Metallic Nanoparticles in Polymers: A New Route Toward Polarization-Dependent Color Filters, Advanced Materials, vol.11, issue.3, pp.223-227, 1999.
DOI : 10.1002/(SICI)1521-4095(199903)11:3<223::AID-ADMA223>3.0.CO;2-J

J. R. Doyle, D. A. Doughty, and A. Gallagher, Silane dissociation products in deposition discharges, Journal of Applied Physics, vol.38, issue.9, pp.4375-4384, 1990.
DOI : 10.1063/1.345188

P. Drude, Zur Elektronentheorie der Metalle, Annalen der Physik, vol.1, pp.566-613, 1900.

H. Ehrenreich and H. R. Philipp, Optical Properties of Ag and Cu, Physical Review, vol.76, issue.4, pp.1622-1629, 1962.
DOI : 10.1088/0370-1328/76/5/301

M. Faraday, Philosophical Transactions of the, 1857.

F. Finger, O. Vetterl, R. Carius, A. Lambertz, C. Scholten et al., Microcrystalline silicon solar cells: relationship between material properties and device performance, Proceedings of the Eleventh International School of Condensed Matter Physics, 2000.

J. Fortner, R. Q. Yu, and J. S. Lannin, Near-surface Raman scattering in germanium clusters and ultrathin amorphous films, Physical Review B, vol.35, issue.36, pp.7610-7613, 1990.
DOI : 10.1103/PhysRevB.35.2456

A. Gallagher, J. Doyle, and D. Doughty, Plasma Chemistry in Silane and Silane-Germane Discharge Deposition, MRS Proceedings, vol.68, pp.23-31, 1989.
DOI : 10.1063/1.341461

D. A. Genov, A. K. Sarychev, and V. M. Shalaev, Plasmon localization and local field distribution in metal-dielectric films, Physical Review E, vol.78, issue.5, p.56611, 2003.
DOI : 10.1103/PhysRevLett.78.215

M. A. Green, Solar Cells, Operating Principles, Technology and System Applications, 1982.

M. A. Green, K. Emery, D. L. King, Y. Hishikawa, and W. Warta, Solar cell efficiency tables (version 28), Progress in Photovoltaics : Research and Applications, pp.455-461, 2006.
DOI : 10.1002/pip.720

URL : http://onlinelibrary.wiley.com/doi/10.1002/pip.2788/pdf

S. Grésillon, L. Aigouy, A. C. Boccara, J. C. Rivoal, X. Quelin et al., Experimental Observation of Localized Optical Excitations in Random Metal-Dielectric Films, Physical Review Letters, vol.46, issue.22, pp.4520-4523, 1999.
DOI : 10.1103/PhysRevB.46.2503

S. Grésillon, S. Ducourtieux, A. Lahrech, L. Aigouy, J. C. Rivoal et al., Nanometer scale apertureless near field microscopy, Applied Surface Science, vol.164, issue.1-4, pp.118-120, 2000.
DOI : 10.1016/S0169-4332(00)00350-0

R. Gupta, M. J. Dyer, and W. A. Weimer, Preparation and characterization of surface plasmon resonance tunable gold and silver films, Journal of Applied Physics, vol.13, issue.9, pp.5264-5271, 2002.
DOI : 10.1021/jp002906x

C. Haase and H. Stiebig, Optimized properties of thin-film silicon solar cells with grating couplers, Progress in Photovoltaics, pp.629-641, 2006.

R. A. Haefer, Oberflächen ? und Dünnschicht ? Technologie Teil 1, Beschichtungen von Oberflächen, 1987.

A. J. Haes and R. P. Van-duyne, A unified view of propagating and localized surface plasmon resonance biosensors, Analytical and Bioanalytical Chemistry, vol.379, issue.7-8, pp.920-930, 2004.
DOI : 10.1007/s00216-004-2708-9

L. Houben, Plasmaabscheidung von mikrokristallinen Silizium: Merkmale der Mikrostruktur und deren Deutung im Sinne von Wachstumsvorgängen, 1998.

L. Houben, M. Luysberg, P. Hapke, R. Carius, F. Finger et al., Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth, Philosophical Magazine A, vol.118, issue.6, pp.1447-1460, 1998.
DOI : 10.1103/PhysRevB.36.3344

H. Hovel, S. Fritz, A. Hilger, U. Kreibig, and M. Vollmer, Width of cluster plasmon resonances: Bulk dielectric functions and chemical interface damping, Physical Review B, vol.35, issue.24, pp.18178-18188, 1993.
DOI : 10.1016/S0022-3697(74)80146-0

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Density of gap states of silicon grain boundaries determined by optical absorption, Applied Physics Letters, vol.2, issue.2, pp.195-197, 1983.
DOI : 10.1016/0379-6787(80)90035-6

W. B. Jackson, S. M. Kelso, C. C. Tsai, J. W. Allen, and S. J. Oh, Energy dependence of the optical matrix element in hydrogenated amorphous and crystalline silicon, Physical Review B, vol.22, issue.60, pp.5187-5198, 1985.
DOI : 10.1080/14786437008221061

J. D. Jackson, Classical Electrodynamics, 1999.

D. L. Jeanmaire and R. P. Van-duyne, Surface Raman spectroelectrochemistry .1. heterocyclic, aromatic, and aliphatic-amines adsorbed on anodized silver electrode, J. of Electroanalytical Chemistry, vol.84, pp.1-20, 1977.

X. Ji, S. Xu, L. Wang, M. Liu, K. Pan et al., Immunoassay using the probe-labeled Au/Ag core-shell nanoparticles based on surfaceenhanced Raman scattering, Colloids and Surfaces A-Physicochemical and Engineering Aspects, vol.257, pp.58-171, 2005.

M. Kaveh and N. Wiser, Electron-electron scattering in conducting materials, Advances in Physics, vol.38, issue.4, pp.257-372, 1984.
DOI : 10.1088/0305-4608/13/12/015

O. Kluth, Präparation und Charakterisierung von texturierten Metalloxid Schichten für Dünschichtsolarzellen, 1996.

O. Kluth, A. Löffel, S. Wieder, C. Beneking, W. Appenzeller et al., Texture etched Al-doped ZnO: a new material for enhanced light trapping in thin film solar cells, Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference, 1997, pp.715-718, 1997.
DOI : 10.1109/PVSC.1997.654189

K. Kneipp, H. Kneipp, I. Itzkan, R. R. Dasari, and M. S. Feld, Surface-enhanced Raman scattering and biophysics, Journal of Physics: Condensed Matter, vol.14, issue.18, pp.597-624, 2002.
DOI : 10.1088/0953-8984/14/18/202

K. Kneipp, Y. Wang, H. Kneipp, L. T. Perelman, I. Itzkan et al., Single Molecule Detection Using Surface-Enhanced Raman Scattering (SERS), Physical Review Letters, vol.46, issue.9, pp.1667-1670, 1997.
DOI : 10.1103/PhysRevB.46.2821

R. Kobliska and S. Solin, Raman Spectrum of Wurtzite Silicon, Physical Review B, vol.26, issue.8, pp.3799-3802, 1973.
DOI : 10.1103/PhysRevLett.26.642

U. Kreibig and M. Vollmer, Optical properties of metal clusters, 1995.
DOI : 10.1007/978-3-662-09109-8

M. Kubon, E. Böhmer, F. Siebke, B. Rech, C. Beneking et al., Solution of the ZnO/p Contact Problem in a-Si:H based Solar Cells, Solar Energy Materials, vol.41, issue.2, pp.485-492, 1996.

P. C. Lee and D. Meisel, Adsorption and surface-enhanced Raman of dyes on silver and gold sols, The Journal of Physical Chemistry, vol.86, issue.17, pp.3391-3395, 1982.
DOI : 10.1021/j100214a025

Z. Liu, H. Wang, H. Li, and X. Wang, Red shift of plasmon resonance frequency due to the interacting Ag nanoparticles embedded in single crystal SiO2 by implantation, Applied Physics Letters, vol.57, issue.15, pp.1823-1825, 1998.
DOI : 10.1103/PhysRev.128.1622

N. A. Logan, Survey of some early studies of the scattering of plane waves by a sphere, Proc. IEEE, pp.773-785, 1965.
DOI : 10.1109/PROC.1965.4055

J. R. Lombardi, R. L. Birke, T. Lu, and J. Xu, Charge???transfer theory of surface enhanced Raman spectroscopy: Herzberg???Teller contributions, The Journal of Chemical Physics, vol.84, issue.8, pp.4174-4180, 1986.
DOI : 10.1016/S0022-0728(83)80225-3

D. A. Long, RAMAN SPECTROSCOPY, 1977.
DOI : 10.1016/B978-0-408-70145-7.50015-6

M. Luysberg, P. Hapke, R. Carius, and F. Finger, Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies, Philosophical Magazine A, vol.63, issue.1, pp.31-47, 1997.
DOI : 10.1116/1.575806

S. A. Maier, Plasmonics : Fundamentals and applications, 2007.
DOI : 10.1007/0-387-37825-1

J. Meier, H. Keppner, S. Dubail, U. Droll, P. Torres et al., Microcrystalline Single-Junction and Micromorph Tandem Thin Film Silicon Solar Cells, MRS Proceedings, vol.420, pp.139-144, 1998.
DOI : 10.1016/S0927-0248(97)00173-6

H. Mertens, J. Verhoeven, A. Polman, and F. D. Tichelaar, Infrared surface plasmons in two-dimensional silver nanoparticle arrays in silicon, Applied Physics Letters, vol.82, issue.8, pp.1317-1319, 2004.
DOI : 10.1088/0963-9659/6/5/009

G. Mie, Beiträge zur Optik trüber Medien, speziell kolloidaler Metallösungen, Ann. Phys, vol.25, pp.377-452, 1908.

M. Moskovits, Surface-enhanced Raman spectroscopy: a brief retrospective, Journal of Raman Spectroscopy, vol.69, issue.6-7, pp.485-496, 2005.
DOI : 10.1007/BFb0109600

M. Moskovits, Surface-Enhanced Raman Spectroscopy: a Brief Perspective, Surface- Enhanced Raman Scattering: Physics and Applications, pp.1-17, 2006.
DOI : 10.1007/3-540-33567-6_1

R. J. Nemanich, C. C. Tsai, and G. A. Connell, Interference-Enhanced Raman Scattering of Very Thin Titanium and Titanium Oxide Films, Physical Review Letters, vol.154, issue.4, pp.273-276, 1980.
DOI : 10.1103/PhysRev.154.522

S. Nie and S. R. Emory, Probing Single Molecules and Single Nanoparticles by Surface-Enhanced Raman Scattering, Science, vol.275, issue.5303, pp.1102-1106, 1997.
DOI : 10.1126/science.275.5303.1102

H. Overhof, Fundamental concepts in the physics of amorphous semiconductors, Journal of Non-Crystalline Solids, vol.227, issue.230, pp.230-245, 1998.
DOI : 10.1016/S0022-3093(98)00020-9

J. Perrin, Plasma and surface reactions during a-Si:H film growth, Journal of Non-Crystalline Solids, vol.137, issue.138, pp.138-639, 1991.
DOI : 10.1016/S0022-3093(05)80202-9

S. Pillai, K. R. Catchpole, T. Trupke, G. Zhang, J. Zhao et al., Enhanced emission from Si-based light-emitting diodes using surface plasmons, Applied Physics Letters, vol.88, issue.16, p.161102, 2006.
DOI : 10.1364/JOSAA.18.002577

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, Surface plasmon enhanced silicon solar cells, Journal of Applied Physics, vol.101, issue.9, p.93105, 2007.
DOI : 10.1088/0022-3719/15/18/012

H. K. Pulker, Coatings on glass, 1984.

R. B. Peumans, P. Forrest, and S. R. , Long-range absorption enhancement in organic tandem thin-film solar cells containing silver nanoclusters, J. Appl. Phys, vol.96, pp.7519-7526, 2004.

B. Rech and H. Wagner, Potential of amorphous silicon for solar cells, Applied Physics A: Materials Science & Processing, vol.69, issue.2, pp.155-167, 1999.
DOI : 10.1007/s003390050986

H. Richter, Z. P. Wang, and L. Ley, The one phonon Raman spectrum in microcrystalline silicon, Solid State Communications, vol.39, issue.5, pp.625-629, 1981.
DOI : 10.1016/0038-1098(81)90337-9

R. K. Roy, S. Bandyopadhyaya, and A. K. Pal, Surface plasmon resonance in nanocrystalline silver in a ZnO matrix, The European Physical Journal B, vol.186, issue.4, pp.491-498, 2004.
DOI : 10.1140/epjb/e2004-00222-x

D. Sainju, P. J. Van-den-oever, N. J. Podraza, M. Syed, J. A. Stoke et al., Origin of Optical Losses in Ag/ZnO Back-Reflectors for Thin Film Si Photovoltaics, 2006 IEEE 4th World Conference on Photovoltaic Energy Conference, pp.1732-1735, 2006.
DOI : 10.1109/WCPEC.2006.279826

H. Sakai and Y. Ichikawa, Process Technology for a-Si/a-Si Double Stacked Tandem Solar Cells with Stabilized 10-percent Efficiency, J. of non-Crystalline Solids, vol.137, pp.1155-1160, 1991.

A. Sauvain, A. Shah, and J. Hubin, Measurement of ambipolar mobility-lifetime product and its significance for amorphous silicon solar cells, Proceedings of the 21 st IEEE Photovoltaic Specialist Conference, pp.1560-1563, 1990.

D. M. Schaadt, B. Feng, and E. T. Yu, Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles, Applied Physics Letters, vol.86, issue.6, p.63106, 2005.
DOI : 10.1016/S0927-0248(99)00100-2

N. Schultz, Präparation und Charakterisierung transparenter Metalloxid-Schichten für Solarzellen aus amorphem Silizium, 1994.

A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner, Photovoltaic Technology: The Case for Thin-Film Solar Cells, Science, vol.285, issue.5428, pp.692-698, 1999.
DOI : 10.1126/science.285.5428.692

J. B. Smith and H. Ehrenreich, Frequency dependence of the optical relaxation time in metals, Physical Review B, vol.13, issue.2, pp.923-930, 1982.
DOI : 10.1103/PhysRevB.13.5316

E. Smith and G. Dent, Modern Raman Spectroscopy: A Practical Approach, 2005.
DOI : 10.1002/0470011831

C. Sönnichsen, S. Geier, N. E. Hecker, G. Von-plessen, J. Feldmann et al., Spectroscopy of single metallic nanoparticles using total internal reflection microscopy, Applied Physics Letters, vol.77, issue.19, pp.2949-2951, 2000.
DOI : 10.1002/(SICI)1521-4095(199902)11:2<149::AID-ADMA149>3.0.CO;2-W

C. Sönnichsen, T. Franzl, T. Wilk, G. Von-plessen, and J. Feldmann, Plasmon resonances in large noble-metal clusters, New Journal of Physics, vol.4, pp.93-94, 2002.
DOI : 10.1088/1367-2630/4/1/393

J. Springer, A. Poruba, L. Müllerova, M. Vanecek, O. Kluth et al., Absorption loss at nanorough silver back reflector of thin-film silicon solar cells, Journal of Applied Physics, vol.37, issue.3, pp.1427-1429, 2004.
DOI : 10.1103/PhysRevB.37.3164

J. Springer, B. Rech, W. Reetz, J. Müller, and M. Vanecek, Light trapping and optical losses in microcrystalline silicon pin solar cells deposited on surface-textured glass/ZnO substrates, Solar Energy Materials and Solar Cells, vol.85, pp.1-11, 2005.
DOI : 10.1016/j.solmat.2004.02.020

D. L. Staebler and C. R. Wronski, Reversible conductivity changes in discharge???produced amorphous Si, Applied Physics Letters, vol.1, issue.4, pp.292-294, 1977.
DOI : 10.1109/T-ED.1977.18740

O. Stenzel, A. Stendal, K. Voigtsberger, and C. Von-borczyskowski, Enhancement of the photovoltaic conversion efficiency of copper phthalocyanine thin film devices by incorporation of metal clusters, Solar Energy Materials and Solar Cells, vol.37, issue.3-4, pp.337-348, 1995.
DOI : 10.1016/0927-0248(95)00027-5

H. Stiebig, A. Kreisel, K. Winz, N. Schultz, C. Beneking et al., Spectral response modelling of a-Si:H solar cells using accurate light absorption profiles, Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion, WCPEC (A Joint Conference of PVSC, PVSEC and PSEC), pp.603-606, 1994.
DOI : 10.1109/WCPEC.1994.520033

H. Stiebig, U. Nosan, M. Krause, M. Jankovec, and M. Topic, Dynamic properties of ultraviolet sensitive detectors, Journal of Non-Crystalline Solids, vol.338, issue.340, pp.299-302, 2002.
DOI : 10.1016/j.jnoncrysol.2004.03.088

H. Stiebig, M. Schulte, C. Zahren, C. Haase, B. Rech et al., Light trapping in thinfilm silicon solar cells by nano-textured interfaces ? art. No. 619701, Photonics Europe Optoelectronics and Photonic Materials, SPIE, vol.6197, pp.19701-19701, 2006.

H. Stiebig, C. Haase, C. Zahren, B. Rech, and N. Senoussaoui, Thin-film silicon solar cells with grating couplers ??? An experimental and numerical study, Journal of Non-Crystalline Solids, vol.352, issue.9-20, pp.1949-1952, 2006.
DOI : 10.1016/j.jnoncrysol.2006.01.072

H. R. Stuart and D. G. Hall, Island size effects in nanoparticle-enhanced photodetectors, Applied Physics Letters, vol.73, issue.26, pp.3815-3817, 1998.
DOI : 10.1103/PhysRevLett.80.5663

M. Stutzmann, Weak bond-dangling bond conversion in amorphous silicon, Philosophical Magazine B, vol.56, issue.1, pp.63-70, 1987.
DOI : 10.1103/PhysRevLett.54.1836

J. Sukmanowski, C. Paulick, O. Sohr, K. Andert, and F. X. Royer, Light absorption enhancement in thin silicon layers, Journal of Applied Physics, vol.34, issue.5, pp.2484-2489, 2000.
DOI : 10.1143/JPSJ.51.2575

M. Tzolov, F. Finger, R. Carius, and P. Hapke, Optical and transport studies on thin microcrystalline silicon films prepared by very high frequency glow discharge for solar cell applications, Journal of Applied Physics, vol.336, issue.11, pp.7376-7385, 1997.
DOI : 10.1557/PROC-336-511

M. Tzolov, N. Tzenov, D. Dimova-malinovska, M. Kalitzova, C. Pizzuto et al., Vibrational properties and structure of undoped and Al-doped ZnO films deposited by RF magnetron sputtering, Thin Solid Films, vol.379, issue.1-2, pp.28-36, 2000.
DOI : 10.1016/S0040-6090(00)01413-9

M. A. Van-dijk, A. L. Tchebotareva, M. Orrit, M. Lippitz, S. Berciaud et al., Absorption and scattering microscopy of single metal nanoparticles, Physical Chemistry Chemical Physics, vol.13, issue.30, pp.3486-3495, 2006.
DOI : 10.1103/PhysRevB.61.16956

URL : https://hal.archives-ouvertes.fr/hal-00143921

S. Vep?ek, F. A. Sarott, S. Rambert, and E. Taglauer, Surface hydrogen content and passivation of silicon deposited by plasma induced chemical vapor deposition from silan and the implications for the reaction mechanism, J. of Vacuum Science & Technology A7, pp.2614-2624, 1989.

O. Vetterl, F. Finger, R. Carius, P. Hapke, L. Houben et al., Intrinsic microcrystalline silicon: A new material for photovoltaics, Solar Energy Materials and Solar Cells, vol.62, issue.1-2, pp.97-108, 2000.
DOI : 10.1016/S0927-0248(99)00140-3

B. Vlckova, I. Pavel, M. Sladkova, K. Siskova, and M. Slouf, Single molecule SERS: Perspectives of analytical applications, Journal of Molecular Structure, vol.834, issue.836, pp.42-47, 2007.
DOI : 10.1016/j.molstruc.2006.11.053

C. Voisin, D. Christofilos, D. Fatti, N. Vallée, F. Prével et al., Size-Dependent Electron-Electron Interactions in Metal Nanoparticles, Physical Review Letters, vol.288, issue.10, pp.2200-2203, 2000.
DOI : 10.1119/1.1974502

J. C. Vossen, Transparent Conducting Films, Physics of Thin films, vol.9, pp.1-71, 1977.

C. Wen, K. Ishikawa, M. Kishima, and K. Yamada, Effects of silver particles on the photovoltaic properties of dye-sensitized TiO2 thin films, Solar Energy Materials and Solar Cells, vol.61, issue.4, pp.339-351, 2000.
DOI : 10.1016/S0927-0248(99)00117-8

J. Werner and M. Peisl, Exponential Band Tails at Silicon Grain Boundaries, MRS Proceedings, vol.1, pp.575-580, 1985.
DOI : 10.1016/0038-1098(82)90962-0

M. Westphalen, U. Kreibig, J. Rostalski, H. Lüth, and D. Meissner, Metal cluster enhanced organic solar cells, Solar Energy Materials and Solar Cells, vol.61, issue.1, pp.97-105, 2000.
DOI : 10.1016/S0927-0248(99)00100-2

S. Wieder, Amorphous Silicon Solar Cells, Comparison of p-i-n and n-i-p Structures with Zinc-Oxide Frontcontact, 1999.

G. P. Wiederrecht, Near-field optical imaging of noble metal nanoparticles, The European Physical Journal Applied Physics, vol.28, issue.1, pp.3-18, 2004.
DOI : 10.1364/OL.28.000801

J. A. Willemen, Modelling of Amorphous Silicon Single-and Multi-Junction Solar Cells, 1998.

K. Winz, B. Rech, T. Eickhoff, C. Beneking, C. M. Fortmann et al., Optoelectronic Properties of Thin Amorphous and Micro-Crystalline p-Type Films Developed for Amorphous Silicon-Based Solar Cells, MRS Proceedings, vol.148, pp.819-824, 1996.
DOI : 10.1557/PROC-149-99

J. Yang, A. Banerjee, and S. Guha, Triple-junction amorphous silicon alloy solar cell with 14.6% initial and 13.0% stable conversion efficiencies, Applied Physics Letters, vol.306, issue.22, pp.2975-2977, 1997.
DOI : 10.1063/1.114332