Influence of Substrate Temperature and Film Thickness on Thermal, Electrical, and Structural Properties of HPPMS and DC Magnetron Sputtered Ge Thin Films  - Université de Lorraine Access content directly
Journal Articles Advanced Engineering Materials Year : 2017

Influence of Substrate Temperature and Film Thickness on Thermal, Electrical, and Structural Properties of HPPMS and DC Magnetron Sputtered Ge Thin Films 

Abstract

Ge was deposited as thickness gradient films at temperatures up to 800C by direct current (DC) and high power pulsed magnetron sputtering (HPPMS). Structural characterization shows increased crystallization with increasing substrate temperature and film thickness. Thermal conductivity was measured by a novel high-throughput time-domain thermo-reflectance method. Thermo-electrical properties correlate to the degree of crystallization. Conductivities increase with increasing substrate temperature up to 500C. For higher temperatures the trend reverses. A room temperature deposited/ annealed film displays smaller crystallites (10 nm) and lower thermal conductivity (5Wm-1 K-1) compared to 25Wm-1K-1 for hot DC deposition. Compared to DC, HPPMS films show higher thermal conductivities up to 45Wm-1K-1.
Fichier principal
Vignette du fichier
FurlanAEM2017_Postprint.pdf (697.79 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Comment : En vertu de la loi pour une République numérique, l'embargo imposé par l'éditeur pour le post-print est réduit à 6 mois à compter de la publication en ligne de l'article
Loading...

Dates and versions

hal-01539190 , version 1 (16-01-2018)

Licence

Attribution - NonCommercial - ShareAlike

Identifiers

Cite

Andrej Furlan, Dario Grochla, Quentin d'Acremont, Gilles Pernot, Stefan Dilhaire, et al.. Influence of Substrate Temperature and Film Thickness on Thermal, Electrical, and Structural Properties of HPPMS and DC Magnetron Sputtered Ge Thin Films . Advanced Engineering Materials, 2017, 19 (5), pp.1600854. ⟨10.1002/adem.201600854⟩. ⟨hal-01539190⟩
607 View
886 Download

Altmetric

Share

Gmail Facebook X LinkedIn More