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Accurate calibration and optimized measurement: use of an achromatic compensator in rotating polarizer spectroscopic ellipsometry

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Abstract

We describe an improvement of a Rotating Polarizer Ellipsometer in order to increase the sensitivity for the measurement of a transparent sample. We added a compensator, namely a quasi-achromatic retardation quarter wave plate on the 400-700nm spectral range. This new configuration is named Polarizer Rotating-Polarizer Compensator Spectroscopic Ellipsometer (PRPCSE). We present a method for calibration and the advantages for measurement of the transparent materials. This method is applied to CuCl nanocrystals embedded in a NaCl transparent matrix.
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Dates and versions

hal-02900945 , version 1 (16-07-2020)

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  • HAL Id : hal-02900945 , version 1

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Laurent Broch, Aotmane En Naciri, Luc Johann. Accurate calibration and optimized measurement: use of an achromatic compensator in rotating polarizer spectroscopic ellipsometry. ICSE-3, 2003, Vienne, Austria. ⟨hal-02900945⟩

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