Optimization of parameters for deposition of ZnO films by sol gel using Taguchi method
Abstract
ZnO transparent conductive films were deposited on glass substrates by sol-gel spin coating method. Taguchi method was used to find the optimal deposition parameters, three influential parameters were selected in this experiment, Concentration of zinc (II) ions. Zn2+, annealing temperature Tr and pre-annealing temperature TP. By employing the analysis of variance, we found that the annealing temperature Tr and the precursor Zn2+ are the most influencing parameters on the properties of ZnO films. Under the optimized deposition conditions, the ZnO films showed high crystal quality, and high transmittance of 90% in the visible region.