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Journal Articles Molecular Crystals and Liquid Crystals Year : 2016

Optimization of parameters for deposition of ZnO films by sol gel using Taguchi method

Abstract

ZnO transparent conductive films were deposited on glass substrates by sol-gel spin coating method. Taguchi method was used to find the optimal deposition parameters, three influential parameters were selected in this experiment, Concentration of zinc (II) ions. Zn2+, annealing temperature Tr and pre-annealing temperature TP. By employing the analysis of variance, we found that the annealing temperature Tr and the precursor Zn2+ are the most influencing parameters on the properties of ZnO films. Under the optimized deposition conditions, the ZnO films showed high crystal quality, and high transmittance of 90% in the visible region.
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Dates and versions

hal-04011179 , version 1 (02-03-2023)

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Youssef Ammaih, Abderrazak Lfakir, Bouchaib Hartiti, Abderraouf Ridah, Meryame Siadat, et al.. Optimization of parameters for deposition of ZnO films by sol gel using Taguchi method. Molecular Crystals and Liquid Crystals, 2016, 627 (1), pp.176-182. ⟨10.1080/15421406.2015.1137268⟩. ⟨hal-04011179⟩
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