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Etude de dispositifs à ondes acoustiques de surface (SAW) à structure multicouche nitrure d'aluminium diamant : croissance de matériaux en couches minces et technologie de réalisation

Abstract : The aims of this work were to study the layered structure SAW devices AlN/diamond and the deposition of AlN and diamond films. Also, this work consist to develop a technologic process necessaries to realise SAW devices. Concerning the technologic process, we have developed a necessaries tools to accomplish a SAW devices by optimisation the experimental parameters relatives of these process. Concerning the growth of diamond films by MPACVD method, we have studied and optimised this deposition in order to obtain diamond films with required properties to utilise it in layered structure SAW devices. Concerning AlN thin films realised by reactive magnetron sputtering, we have studied and optimised the deposition to obtain a piezoelectric films oriented c-axis perpendicular to the surface. We have realised a layered structures SAW devices based on AlN/Si, AlN/saphir and AlN/diamond, and we have show the influence of substrate of layered structure on propagation velocity of SAW.
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http://docnum.univ-lorraine.fr/prive/SCD_T_2001_0202_ASSOUAR.pdf
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https://hal.univ-lorraine.fr/tel-01746509
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Submitted on : Thursday, March 29, 2018 - 10:39:22 AM
Last modification on : Wednesday, March 24, 2021 - 10:22:02 AM

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  • HAL Id : tel-01746509, version 1

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Mohamed Badreddine Assouar. Etude de dispositifs à ondes acoustiques de surface (SAW) à structure multicouche nitrure d'aluminium diamant : croissance de matériaux en couches minces et technologie de réalisation. Autre. Université Henri Poincaré - Nancy 1, 2001. Français. ⟨NNT : 2001NAN10202⟩. ⟨tel-01746509⟩

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