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Etude et réalisation de résonateurs à ondes acoustiques de volume (FBAR) montés sur miroir acoustique et exploitant le mode de cisaillement dans les couches minces d'oxyde de zinc (ZnO) à axe c incliné : application aux capteurs gravimétriques en milieux liquides

Abstract : Further progress of health-care requires miniaturized sensors for the improvement of medical diagnostics. In this context, the objective of this thesis is to simulate, realize and characterize shear mode solidly mounted film bulk acoustic resonators (SMR) vibrating at 800 MHz, and demonstrate their ability to function as gravimetric bio-chemical sensors in liquids. Three sputter-deposition processes for ZnO films having an inclined c-axis with respect to the surface normal have been developed. Such films are required for the excitation of shear waves and thus essential for operation in liquids. Inclinations of up to 16Ê have been obtained through oblique incidence of the particles using additional blinds. Homogeneous films have been achieved on up to 100 % of the 4" wafer surface. Simulation and characterization tools have permitted to optimize the SMRs, improving coupling coefficients from 0.012 to 0.149 (K2 of 2.2 %) and Q-factors from 3.5 to 230. The application of the SMRs in water and glycerol solutions has shown that they are suitable as viscosity and gravimetric sensors. Measurements of antibody-antigen bindings in liquid have been successful. Compared with 10 MHz quartz crystal microbalances, the obtained sensitivity of 738 Hz cm2/ng is 1000 times higher and the mass resolution of 3.5 ng/cm2 is 4 times better. SMRs are highly sensitive, can be integrated with electronics, and allow quantitative time-dependent measurements with good mass resolutions. These piezoelectric film nanobalances are expected to form the core of portable and inexpensive systems to serve the medical diagnostic market.
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Theses
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http://docnum.univ-lorraine.fr/prive/SCD_T_2006_0093_LINK.pdf
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https://hal.univ-lorraine.fr/tel-01746605
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Submitted on : Thursday, March 29, 2018 - 10:41:09 AM
Last modification on : Thursday, February 25, 2021 - 1:06:02 PM

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  • HAL Id : tel-01746605, version 1

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Mathias Link. Etude et réalisation de résonateurs à ondes acoustiques de volume (FBAR) montés sur miroir acoustique et exploitant le mode de cisaillement dans les couches minces d'oxyde de zinc (ZnO) à axe c incliné : application aux capteurs gravimétriques en milieux liquides. Autre. Université Henri Poincaré - Nancy 1, 2006. Français. ⟨NNT : 2006NAN10093⟩. ⟨tel-01746605⟩

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