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Etude théorique et expérimentale de dispositifs à ondes élastiques de surface (O.E.S) à base des structures multicouches : ZnO/Quartz, AIN/Diamant et ZnO/AIN/Diamant

Abstract : We investigate in this work the multilayer structures ZnO/Quartz, AlN/Diamond and ZnO/AlN/Diamond for designing SAW sensors and high frequency SAW filters. Beginning with a theoretical study that we have developed for modelling the SAW structures, we discuss then the technological processes used for preparing such devices and also the characterisation methods implemented to determine the device principal parameters. We describe subsequently an original method that we have established for SAW device design of the deposits on the diamond. The films are grown in this method on the unpolished nucleation side of the freestanding CVD diamond. These nucleation side have good morphological qualities which enhance the acoustic wave propagation. The ZnO/Quartz-based SAW sensors and AlN/Diamond-based SAW filters that we have designed are then presented and discussed as to their performances. While the sensors show a high sensibility and a low temperature coefficient, the filter can be operate at high frequencies without loosing its filtering capacity. Finally, a. new SAW device based on ZnO/AlN/Diamond combining high phase velocity and high electromechanical coupling coefficient has been investigated for GHz-band applications.
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Theses
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http://docnum.univ-lorraine.fr/prive/SCD_T_2005_0012_EL_HAKIKI.pdf
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https://hal.univ-lorraine.fr/tel-01746691
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Submitted on : Thursday, March 29, 2018 - 10:42:47 AM
Last modification on : Wednesday, March 24, 2021 - 10:22:02 AM

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  • HAL Id : tel-01746691, version 1

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Mohamed El Hakiki. Etude théorique et expérimentale de dispositifs à ondes élastiques de surface (O.E.S) à base des structures multicouches : ZnO/Quartz, AIN/Diamant et ZnO/AIN/Diamant. Autre. Université Henri Poincaré - Nancy 1, 2005. Français. ⟨NNT : 2005NAN10012⟩. ⟨tel-01746691⟩

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