Skip to Main content Skip to Navigation
Theses

Sensibilité des dispositifs à ondes élastiques de surface réalisés sur des structures monocouches de quartz et structure bicouche de ZnO/Si aux déformations mécaniques : application au capteur de pression

Abstract : The aim of this thesis is the devellopment of a pressure sensor using surface acoustic wave device. A theoretical and exprimental study of the sensor perfomed on quartz substrate and ZnO/Si structure are presented. Concerning the experimental study we have developped an experimental set-up wich permit testing under pressure. We have developed and optimized the SAW process manufacturing using SILVACO (soft for process simulation). We have also optimized the ZnO piezoelectric film deposition by using a DC planar magnetron sputtering system. Concerning the theoretical study we have developed a set of computer code in MATLAB environnement. For linear surface acoustic wave propagation a Jones and campbel method is used. For nonlinear surface acoustic wave propagation a Tierstein perturbation procedure was used. Both devices performed on quartz and ZnO/Si structure were investigated.
Document type :
Theses
File URL :
http://docnum.univ-lorraine.fr/prive/SCD_T_2003_0184_TALBI.pdf
Complete list of metadatas

https://hal.univ-lorraine.fr/tel-01746834
Contributor : Thèses Ul <>
Submitted on : Thursday, March 29, 2018 - 10:45:47 AM
Last modification on : Thursday, February 25, 2021 - 1:06:02 PM

Identifiers

  • HAL Id : tel-01746834, version 1

Collections

Citation

Abdelkrim Talbi. Sensibilité des dispositifs à ondes élastiques de surface réalisés sur des structures monocouches de quartz et structure bicouche de ZnO/Si aux déformations mécaniques : application au capteur de pression. Autre. Université Henri Poincaré - Nancy 1, 2003. Français. ⟨NNT : 2003NAN10184⟩. ⟨tel-01746834⟩

Share

Metrics

Record views

34