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Etude comparative des plasmas N2 et N2-H2 fonctionnant en regime continu et pulse basse fréquence : caractérisation expérimentale des cinétiques des états radiatifs N2(B3[pl]g), N2(C3[pl]u), N2+(B2[sigma]u+) et métastables N2(A3[sigma]u+) et N2+([aspiré : khl]2[sigma]g+)

Abstract : This work aims at improving the knowledge of N2 and N2-H2 DC or DC-pulsed plasmas in order to better understand the kinetics occurring in the gas phase of a plasma assisted nitriding process. Investigations by means of emission spectroscopy and laser induced fluorescence are carried out to study the radiative and metastable species that influence the plasma reactivity. The comparison of time-resolved experimental measurements with a simplified kinetic modelling of sorne nitrogen excited levels leads to the determination of the density of these states, in particular Nz(A) and N atoms. The study of the variation of these densities with various plasma parameters allows some specific working condition to be established that optimise the different level densities. Values of the control parameters are thus deduced that allow the plasma reactivity to be enhanced. Furthermore the preferential populating process of N2+(B) ion has been pointed out : - from electron collision with the ground state of the neutral N2 molecule during the discharge phase ; - from electron collision with the ground state of N2+ molecular ion during the afterglow. It is also shown that a small amount of H2 (<10%) in N2 gas strongly interact with N2(X) ground state ion to form N2H+ ions.
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http://docnum.univ-lorraine.fr/prive/SCD_T_1999_0037_SCHERENTZ.pdf
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https://hal.univ-lorraine.fr/tel-01747067
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Submitted on : Thursday, March 29, 2018 - 10:50:27 AM
Last modification on : Wednesday, March 24, 2021 - 10:22:02 AM

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Véronique Scherentz. Etude comparative des plasmas N2 et N2-H2 fonctionnant en regime continu et pulse basse fréquence : caractérisation expérimentale des cinétiques des états radiatifs N2(B3[pl]g), N2(C3[pl]u), N2+(B2[sigma]u+) et métastables N2(A3[sigma]u+) et N2+([aspiré : khl]2[sigma]g+). Autre [cond-mat.other]. Université Henri Poincaré - Nancy 1, 1999. Français. ⟨NNT : 1999NAN10037⟩. ⟨tel-01747067⟩

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