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Ellipsométrie à élément(s) tournant(s) : impact des erreurs aléatoires et sytèmatiques sur les grandeurs ellipsométriques

Abstract : This thesis is devoted to the influence of systematic and random errors on the ellipsometric parameters. For each error, we propose solutions to reduce and eliminate their influence on the final result. The first part outlines the basic principles of ellipsometry and describes the experimental set-up of rotating element(s) ellipsometers used in LPMD. For each configuration, the methods of measurement and calibration are presented. The second part deals with random errors and presents an original method, called tracking, to reduce their impact on the ellipsometric parameters. Measurement errors and errors generated during the calibration of a rotating polarizer ellipsometer (PRPSE) are exposed. An optimized configuration called PRPCSE, allowing the characterization of systems when the angle Delta is near 0° or 180° is proposed. Random errors and methods of optimization for a Rotating Compensator Ellipsometer (RCE) are also described. The third part deals with the systematic errors of a Mueller Matrix Ellipsometer (MME) in the dual rotating compensator configuration. A measurement procedure called 4-zones, which reduces the impact of errors on the reflection matrix of the sample is given. Numerical and experimental examples illustrate the developed methods
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https://hal.univ-lorraine.fr/tel-01748813
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Broch.Laurent.SMZ1106.pdf
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  • HAL Id : tel-01748813, version 1

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Laurent Broch. Ellipsométrie à élément(s) tournant(s) : impact des erreurs aléatoires et sytèmatiques sur les grandeurs ellipsométriques. Autre [cond-mat.other]. Université Paul Verlaine - Metz, 2011. Français. ⟨NNT : 2011METZ006S⟩. ⟨tel-01748813⟩

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