Caracterisation de dépôts multicouches TiCxNy et Al2O3 sur WC : analyse quantitative par SIMS

Abstract : Quantification in Secondary Ion Mass Spectrometry is a recurring problem since the creation of this analytical technique. The determination of elements concentration inside an industrial sample was the final goal of this project. So, we work on several ways to succeed: some of them are already known (oxygen bombardment and cationization), others are more original (EEF/OF). EEF/OF technique uses oxygen bombardment, secondary ions have an initial energy of 600eV and there is oxygen flooding on sample surface. For these three methods, quantitative power has been tested on calibration standards and on multiplayer based titanium and aluminum samples. Our study shows us that oxygen bombardment will never be a quantitative analytical technique in spite of an important detection sensibility. The two others techniques have quantitative power: for majors elements EEF/OF has an important quantitative power but this technique is unable to quantify oxygen and the limit of detection sensibility does not authorize the detection of some minors elements. EEF/OF could be used in addition to cationization method, which allows oxygen detection and which have a higher detection sensibility limit. On the other hand, the accuracy between calculated concentrations and real concentrations are better for EEF/OF method.
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Theses
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http://docnum.univ-lorraine.fr/prive/INPL_T_2003_DUEZ_B.pdf
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https://hal.univ-lorraine.fr/tel-01750142
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Submitted on : Thursday, March 29, 2018 - 12:39:02 PM
Last modification on : Monday, April 16, 2018 - 10:40:59 AM

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Benoît Duez. Caracterisation de dépôts multicouches TiCxNy et Al2O3 sur WC : analyse quantitative par SIMS. Autre [cond-mat.other]. Institut National Polytechnique de Lorraine, 2003. Français. ⟨NNT : 2003INPL089N⟩. ⟨tel-01750142⟩

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