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Synthèse par pulvérisation cathodique magnétron et caractérisation de films minces dédiés au développement d'un dispositif électrochrome "tout céramique" à électrolyte NASICON :

Abstract : The development of a fully ceramic electrochromic device based on a thin films stack represents a technological jump that could allow a mass production of electrochromic systems. The main difficulty consists in synthesising a well suited electrolyte and in the compatibility of the various elements. After a description of the experimental device and the presentation of the methods used to characterise the deposited layers, we present the limitations of the classical magnetron sputtering technique to synthesise thin NASICONs (Na3Zr2Si2PO12) films and propose a new method based on the reactive co-sputtering of Zr-Si and Na3PO4 targets. The films, amorphous in their as deposited state, present a good chemical homogeneity on large areas and cristallise under a NASICONs structure after annealing at temperatures lower than 750°C. The ionic conductivity evolves with the structural organisation and shows values close to the characteristic ones of bulk NASICONs. A study of the relations between the elaboration parameters and the optical and electrical properties of ZnO: Al transparent electrodes shows the possibility to synthesise this material under thin highly conducting and transparent films form on large scale in a short interval of experimental conditions. Finally, electrochromic tests on ITO-WO3 and ITO-WO3-NASICON evidenced the validity of the concept of an electrochromic device based on a Na+ conducting ceramic electrolyte.
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David Horwat. Synthèse par pulvérisation cathodique magnétron et caractérisation de films minces dédiés au développement d'un dispositif électrochrome "tout céramique" à électrolyte NASICON :. Autre. Institut National Polytechnique de Lorraine, 2006. Français. ⟨NNT : 2006INPL025N⟩. ⟨tel-01752485⟩

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