Synthèse et caractérisation chimique de cristaux et films de diamant par dépôt chimique en phase vapeur assisté par plasma micro-ondes

Abstract : The aim of this work was to investigate chemical characterization of diamond crystals and films elaborated by microwave plasma assisted chemical vapour deposition on silicon. This study was focused on a pluri-technique approach founded on the spectroscopic techniques. Raman spectroscopy, XPS spectroscopy, X-ray diffraction and scanning electron microscopy have provided essential and additional information about physico-chemical and structural properties of diamond deposits according to a various synthesis parameters. As examples, a new electronic transition was observed for hydrogen-terminated diamond surface films. This transition presents a surface gap at 2,7 eV provided by a resonant Raman. Anisotropic internal stresses were observed for films presenting a fiber axis <110> and for isolated twinned crystals presenting a secondary nucleation.
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Nesrine Hellala. Synthèse et caractérisation chimique de cristaux et films de diamant par dépôt chimique en phase vapeur assisté par plasma micro-ondes. Autre. Institut National Polytechnique de Lorraine, 2006. Français. ⟨NNT : 2006INPL075N⟩. ⟨tel-01752770⟩

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