Skip to Main content Skip to Navigation
Theses

Élaboration et caractérisation de revêtements type "Diamond-Like Carbon" déposés par un procédé chimique en phase vapeur assisté par un plasma basse fréquence

Abstract : Hydrogenated amorphous carbon films (a-C:H) and hydrogenated silicon carbide films (a-SiC:H) are deposited by low frequency (40 kHz) plasma enhanced chemical vapour deposition (LF PECVD). Structural, mechanical and tribological properties of those single layers have been first studied in relation with process parameters. Then those results have been used to study two other systems. The first one corresponds to silicon doped a-C:H thin films and the second one to multilayered coatings consisting in a stack of a-C:H and a-SiC:H layers. Those coatings offer potential advantages such as lower residual stress level comparing to that of a-C:H stress level which gives the opportunity to deposit thicker films, and also attractive mechanical and tribological properties. Moreover, in case of applications like car engine parts for example, adhesion and tribological properties under lubrication have to be improved. Solutions as incorporating underlayer or texturing surface are thus also investigated in this study
Complete list of metadatas

Cited literature [20 references]  Display  Hide  Download

https://hal.univ-lorraine.fr/tel-01753026
Contributor : Thèses Ul <>
Submitted on : Thursday, March 29, 2018 - 2:04:58 PM
Last modification on : Monday, April 16, 2018 - 10:42:51 AM

File

2008_CHOUQUET_C.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : tel-01753026, version 1

Collections

Citation

Caroline Chouquet. Élaboration et caractérisation de revêtements type "Diamond-Like Carbon" déposés par un procédé chimique en phase vapeur assisté par un plasma basse fréquence. Autre. Institut National Polytechnique de Lorraine, 2008. Français. ⟨NNT : 2008INPL096N⟩. ⟨tel-01753026⟩

Share

Metrics

Record views

44

Files downloads

93