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Contribution à l'étude des textures dans les couches minces : caractérisation de barrières de diffusion de nitrure de titane

Abstract : The first part of the study is concerned with the ability of the reduced incidence X-ray diffraction technique to measure pole figures for thin films. In order to improve the statistical noise and the ratio diffracted intensity/background, the volume of irradiated material is increased by measuring poles figures with an asymetric beam path. However, the drawback is that the pole figures become incomplete in the center. To define the orientation distribution fonction, an optimum compromise has to be found between the increase in data quality and the decrease in number of available measurements related to the size of missing zone. The question is investigated on a sqet of titanium nitride layers with thicknesses ranging from 20 to 600 nanometers, sputter-deposited on monocrystalline silicon substrates. Modelling is also carried out, defining a tool which allows to find the optimal measurement conditions for a given material (thickness and texture). Titanuium nitride is used in the microelectronic industry as diffusion barriers between aluminium and silicon in the following layer configuration : Si/Ti (20nm)/TiN(100nm)/Al. In the second part of the study, TiN microstructural features (textures, grain sizes, residual stresses...) are correlated to deposition parameters (substrate temperature, gaz composition), and physical properties (resistivity, diffusion). The main texture component of TiN is a 111 fiber normal to the layer surface for all specimen investigated. The study points out the specificity of some diffusion barriers to grow with a secondary 311 fiber texture. It generates from the epitaxial relationship with the10.1 planes of the titanium underlayer. This texture feature, linked to the diffusion behaviour of the layer system, leads to an original consideration of the anisotropic nature of the diffusion coefficient
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  • HAL Id : tel-01775431, version 1



Benoît Moreau. Contribution à l'étude des textures dans les couches minces : caractérisation de barrières de diffusion de nitrure de titane. Matériaux. Université Paul Verlaine - Metz, 1993. Français. ⟨NNT : 1993METZ013S⟩. ⟨tel-01775431⟩



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