HAL will be down for maintenance from Friday, June 10 at 4pm through Monday, June 13 at 9am. More information
Skip to Main content Skip to Navigation
Journal articles

An insight into the structure–property relationships of PECVD SiCxNy(O):H materials

Abstract : In this work the structure-property relationships of SiCxNy(O):H gas separation membranes prepared by PECVD is investigated. X-ray photoemission spectroscopy, fast Fourier transform infra-red spectroscopy and X-ray reflectometry are used to determine both the atomic and chemical bond concentrations in the PECVD membrane materials. Coupling these experimental data with a continuous random network model (cluster approach), a 3D molecular description of the material is proposed. It is shown that such approach can depict the composition and the electronic density of the PECVD Sic(x)N(y)(O):H, thus providing description of material porosity that accounts for the measured gas transport properties of both He and N-2 through the membranes.
Document type :
Journal articles
Complete list of metadata

Contributor : Lcpme Ul Connect in order to contact the contributor
Submitted on : Tuesday, March 28, 2017 - 2:13:40 PM
Last modification on : Friday, April 1, 2022 - 3:00:41 AM




Romain Coustel, Mathias Haacké, V. Rouessac, Jean Durand, Martin Drobek, et al.. An insight into the structure–property relationships of PECVD SiCxNy(O):H materials. Microporous and Mesoporous Materials, Elsevier, 2014, 191, pp.97 - 102. ⟨10.1016/j.micromeso.2014.02.043⟩. ⟨hal-01497218⟩



Record views