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An insight into the structure–property relationships of PECVD SiCxNy(O):H materials

Abstract : In this work the structure-property relationships of SiCxNy(O):H gas separation membranes prepared by PECVD is investigated. X-ray photoemission spectroscopy, fast Fourier transform infra-red spectroscopy and X-ray reflectometry are used to determine both the atomic and chemical bond concentrations in the PECVD membrane materials. Coupling these experimental data with a continuous random network model (cluster approach), a 3D molecular description of the material is proposed. It is shown that such approach can depict the composition and the electronic density of the PECVD Sic(x)N(y)(O):H, thus providing description of material porosity that accounts for the measured gas transport properties of both He and N-2 through the membranes.
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https://hal.univ-lorraine.fr/hal-01497218
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Submitted on : Tuesday, March 28, 2017 - 2:13:40 PM
Last modification on : Friday, April 1, 2022 - 3:00:41 AM

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Romain Coustel, Mathias Haacké, V. Rouessac, Jean Durand, Martin Drobek, et al.. An insight into the structure–property relationships of PECVD SiCxNy(O):H materials. Microporous and Mesoporous Materials, Elsevier, 2014, 191, pp.97 - 102. ⟨10.1016/j.micromeso.2014.02.043⟩. ⟨hal-01497218⟩

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