An insight into the structure–property relationships of PECVD SiCxNy(O):H materials - Université de Lorraine Access content directly
Journal Articles Microporous and Mesoporous Materials Year : 2014

An insight into the structure–property relationships of PECVD SiCxNy(O):H materials

Abstract

In this work the structure-property relationships of SiCxNy(O):H gas separation membranes prepared by PECVD is investigated. X-ray photoemission spectroscopy, fast Fourier transform infra-red spectroscopy and X-ray reflectometry are used to determine both the atomic and chemical bond concentrations in the PECVD membrane materials. Coupling these experimental data with a continuous random network model (cluster approach), a 3D molecular description of the material is proposed. It is shown that such approach can depict the composition and the electronic density of the PECVD Sic(x)N(y)(O):H, thus providing description of material porosity that accounts for the measured gas transport properties of both He and N-2 through the membranes.
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hal-01497218 , version 1 (28-03-2017)

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Romain Coustel, Mathias Haacké, V. Rouessac, Jean Durand, Martin Drobek, et al.. An insight into the structure–property relationships of PECVD SiCxNy(O):H materials. Microporous and Mesoporous Materials, 2014, 191, pp.97 - 102. ⟨10.1016/j.micromeso.2014.02.043⟩. ⟨hal-01497218⟩
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