An insight into the structure–property relationships of PECVD SiCxNy(O):H materials

Abstract : In this work the structure-property relationships of SiCxNy(O):H gas separation membranes prepared by PECVD is investigated. X-ray photoemission spectroscopy, fast Fourier transform infra-red spectroscopy and X-ray reflectometry are used to determine both the atomic and chemical bond concentrations in the PECVD membrane materials. Coupling these experimental data with a continuous random network model (cluster approach), a 3D molecular description of the material is proposed. It is shown that such approach can depict the composition and the electronic density of the PECVD Sic(x)N(y)(O):H, thus providing description of material porosity that accounts for the measured gas transport properties of both He and N-2 through the membranes.
Type de document :
Article dans une revue
Microporous and Mesoporous Materials, Elsevier, 2014, 191, pp.97 - 102. 〈http://www.sciencedirect.com/science/article/pii/S1387181114001152〉. 〈10.1016/j.micromeso.2014.02.043〉
Domaine :
Liste complète des métadonnées

https://hal.univ-lorraine.fr/hal-01497218
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Soumis le : mardi 28 mars 2017 - 14:13:40
Dernière modification le : jeudi 24 mai 2018 - 10:32:01

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Romain Coustel, Mathias Haacké, Vincent Rouessac, Jean Durand, Martin Drobek, et al.. An insight into the structure–property relationships of PECVD SiCxNy(O):H materials. Microporous and Mesoporous Materials, Elsevier, 2014, 191, pp.97 - 102. 〈http://www.sciencedirect.com/science/article/pii/S1387181114001152〉. 〈10.1016/j.micromeso.2014.02.043〉. 〈hal-01497218〉

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