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Poster Communications Year : 2007

Systematic errors for a Mueller Matrix Ellipsometer


We present the influence of systematic errors due to azimuth errors of the optical elements for a MME. This ellipsometer is based on the dual rotating-compensator principle in the PC1SC2A configuration developed by Collins. The first and secondorder systematic errors have been characterized for all elements of the 4×4 normalized Mueller matrix and for the Jones matrix elements tanYpp and Dpp. We show that these errors can be eliminated by a four zone measurement technical.
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hal-02900774 , version 1 (16-07-2020)


  • HAL Id : hal-02900774 , version 1


G Piller, L. Broch, L. Johann. Systematic errors for a Mueller Matrix Ellipsometer. 4th International Conference on Spectroscopic Elllliipsometry, Jun 2007, Stockholm, Sweden. ⟨hal-02900774⟩
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