Towards homogeneous and reproducible highly oriented diamond films - Université de Lorraine Access content directly
Journal Articles Diamond and Related Materials Year : 2000

Towards homogeneous and reproducible highly oriented diamond films

Abstract

Diamond films have been deposited by the microwave plasma assisted chemical vapor deposition technique using an ultra short bias enhanced nucleation step to synthesize highly oriented diamond films on single silicon substrate. Firstly in this paper, we focus on the bias enhanced nucleation process to obtain homogeneous and reproducible diamond deposits. By optimizing the process, we obtained a crystal density value of 109 cm−2 on the whole substrate surface for a reduced polarization time of 60 s. Then, using scanning electron microscopy and image analysis, we report cartographies of crystal densities, covering rate and average radius on the whole sample surface. Next, we analyze a local area of the surface to produce a size distribution of the particles versus their type. Lastly, we present a discussion on the ratio of epitaxial crystals.
Fichier principal
Vignette du fichier
Full text.pdf (106.33 Ko) Télécharger le fichier
Full figure.pdf (486.5 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Licence : CC BY NC ND - Attribution - NonCommercial - NoDerivatives
Licence : CC BY NC ND - Attribution - NonCommercial - NoDerivatives

Dates and versions

hal-03978899 , version 1 (10-02-2023)

Licence

Attribution - NonCommercial - NoDerivatives

Identifiers

Cite

S. Saada, S. Barrat, E. Bauer-Grosse. Towards homogeneous and reproducible highly oriented diamond films. Diamond and Related Materials, 2000, 9 (3-6), pp.300-304. ⟨10.1016/S0925-9635(99)00334-9⟩. ⟨hal-03978899⟩
8 View
11 Download

Altmetric

Share

Gmail Facebook X LinkedIn More