Prediction of the feasibility of oriented diamond films by microwave plasma-assisted CVD - Université de Lorraine Access content directly
Journal Articles Diamond and Related Materials Year : 1995

Prediction of the feasibility of oriented diamond films by microwave plasma-assisted CVD

Abstract

After the nucleation step, the fabrication of textured or heteroepitaxial diamond film depends strongly on the direction of the fastest growth (vector denoted dv max) associated with every diamond particle. From quantification of this vector for single-crystal and multiply twinned particles (MTPs), we can determine the relative feasibility of textured or heteroepitaxial films in relation to preparation conditions such as the hydrocarbon concentration or substrate temperature. This theoretical study, that takes account of the results of morphological and structural characterizations of textured diamond films, reveals the difficulty of producing 〈111〉 textured films that lead to 〈011〉 textured films, and the ease of obtaining 〈001〉 textured films.
Fichier principal
Vignette du fichier
Article_final.pdf (293.44 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Licence : CC BY NC ND - Attribution - NonCommercial - NoDerivatives

Dates and versions

hal-03978974 , version 1 (10-02-2023)

Licence

Attribution - NonCommercial - NoDerivatives

Identifiers

Cite

S. Barrat, E. Bauer-Grosse. Prediction of the feasibility of oriented diamond films by microwave plasma-assisted CVD. Diamond and Related Materials, 1995, 4 (4), pp.419-424. ⟨10.1016/0925-9635(94)05315-4⟩. ⟨hal-03978974⟩
10 View
8 Download

Altmetric

Share

Gmail Facebook X LinkedIn More