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Article Dans Une Revue Applied Surface Science Année : 2007

Electrostatic spray deposited zinc oxide films for gas sensor applications

Résumé

In this work, thin films of zinc oxide (ZnO) for gas-sensor applications were deposited on platinum coated alumina substrate, using electrostatic spray deposition (ESD) technique. As precursor solution zinc acetate in ethanol was used. Scanning electron microscopy (SEM) evaluation showed a porous and homogeneous film morphology and the energy dispersive X-ray analysis (EDX) confirmed the composition of the films with no presence of other impurities. The microstructure studied with X-ray diffraction (XRD) and Raman spectroscopy indicated that the ZnO oxide films are crystallized in a hexagonal wurtzite phase. The films showed good sensitivity to 1 ppm nitrogen dioxide (NO2) at 300 °C while a much lower sensitivity to 12 ppm hydrogen sulphide (H2S).

Dates et versions

hal-04011771 , version 1 (02-03-2023)

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Citer

Camelia Matei Ghimbeu, Joop Schoonman, Martine Lumbreras, Maryam Siadat. Electrostatic spray deposited zinc oxide films for gas sensor applications. Applied Surface Science, 2007, 253 (18), pp.7483-7489. ⟨10.1016/j.apsusc.2007.03.039⟩. ⟨hal-04011771⟩
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