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Conception, étude et réalisation de micro-capteurs et micro-actionneurs chimiques et biologiques à base de dispositifs à ondes acoustiques de surface

Abstract : This work deals with SAW/Liquid interaction. We want to evaluate the potentiality of a microfluidic system based on surface acoustic waves. This system was carried out on a LiNbO3 piezoelectric substrate, cut Y+128° X-propagating. We used clean room traditional techniques to reveal the interdigited transducers (IDTs). In order to minimize the required force to actuate a droplet, we have optimised plasma process to deposit fluorinated carbon films. The coating which presents the lowest sliding force was deposited at (400 mT, 100 W). Then, we have investigated the phenomena induced by the SAW/Liquid interaction. By PIV method, we have visualized the flow trajectory within the droplet and determined the streaming velocity as function of fluid viscosity and electrical power. Next, we have measured the droplet displacement velocity as function of volume and viscosity. Finally, we have shown important heating effects, related to the attenuation of the surface elastic waves at the Solid/Liquid interface. These analyses were carried out with an IR camera and reveal that a 20 l droplet with sufficient viscosity can be heated above 80°C. To conclude, our surface acoustic wave device presents a real potential as microfluidic tool . Indeed, numerous applications, such as atomisation system, micro-nanodispenser, actuator, mixer, thermocycler can be achieve by this device.
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http://docnum.univ-lorraine.fr/prive/SCD_T_2006_0167_BEYSSEN.pdf
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https://hal.univ-lorraine.fr/tel-01746563
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Submitted on : Thursday, March 29, 2018 - 10:40:21 AM
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  • HAL Id : tel-01746563, version 1

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Denis Beyssen. Conception, étude et réalisation de micro-capteurs et micro-actionneurs chimiques et biologiques à base de dispositifs à ondes acoustiques de surface. Autre. Université Henri Poincaré - Nancy 1, 2006. Français. ⟨NNT : 2006NAN10167⟩. ⟨tel-01746563⟩

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