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Etude des plasmas micro-ondes pulsés CH4-H2 en vue de l'optimisation de la croissance de films de diamant : Application à la réalisation de dispositifs à ondes acoustiques de surface

Abstract : This work consists of studying H2-CH4 MPACVD process, operating at high power in continuous and pulsed mode. Plasma characterisation is carried out, thanks to diagnostic techniques such as: OES, Double pulses technique and LIF. The aim of this study is to understand the basic phenomena which control the kinetics of the reactive species responsible of diamond growth. Diamond films are characterised by: SEM, AFM and Raman spectroscopy. Correlations between the plasma parameters and the films properties, their chemical quality and the growth rate, are established. The elaborated freestanding diamond films, were useful for development of surface acoustic devices (SAW) devices with multi-layer structure ZnO/IDT/Diamond. The propagation velocity of surface acoustic waves at ZnO/Diamond interface is estimated from the frequency response of the device. It is around 9700 m.s-1 which is among the highest velocities in this type of structures.
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Tarek Lamara. Etude des plasmas micro-ondes pulsés CH4-H2 en vue de l'optimisation de la croissance de films de diamant : Application à la réalisation de dispositifs à ondes acoustiques de surface. Autre [cond-mat.other]. Université Henri Poincaré - Nancy 1, 2004. Français. ⟨NNT : 2004NAN10187⟩. ⟨tel-01746736⟩

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