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Réalisation et caractérisation d'un capteur de gaz à ondes de Love à base de la structure Polyaniline/ZnO/Quartz

Abstract : The work presented in this book concerns the realization and characterization of a gas sensor based on surface acoustic wave (SAW) devices. To obtain and work with these waves, two interdigital transducers, one emitting and one receiving, are deposited on a piezoelectric substrate. An alternating input signal at the emitting IDT stimulates a wave that propagates along the substrate. At the receiving IDT, this wave is converted into electrical output signal. To obtain a gas sensor, a sensitive film is added in the path of the wave, between the IDTs. The gas adsorption on the sensitive film perturbs the wave propagation and modifies its velocity and amplitude. The sensor structure developed and characterized during this PhD thesis is the following : Polyaniline/ZnO/Quartz. The two layers ZnO/Quartz substrate, for a 90° propagating direction, generates the Love waves and the polyaniline, polymer that can be modified by functional groups is used as sensitive layer. The waves generating structure has been realized entirely in a clean room, especially with the optimisation of the ZnO films deposition by RF magnetron reactive pulverisation process and the photolithography of the IDTs. Then, this structure has been studied and characterized, before and after the sensitive layer deposition, with experimental measurements compared with theoretical estimations. Finally, we have made gas tests (NO2, SO2 and ethanol) with the sensor. In this way, we have shown that the Polyaniline/ZnO/Quartz structure can be used as gas sensor.
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Felicidade da Silva Moreira. Réalisation et caractérisation d'un capteur de gaz à ondes de Love à base de la structure Polyaniline/ZnO/Quartz. Autre. Université Henri Poincaré - Nancy 1, 2007. Français. ⟨NNT : 2007NAN10094⟩. ⟨tel-01748274⟩



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