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Elaboration et caractérisation de nanostructures carbonées par procédé CVD assisté par plasma microonde

Abstract : We report in this study, the growth of silicon carbide nanofibers and carbon nanotubes by MPACVD. Regarding to the pre-treatment conditions of the catalytic layer, used in our reactor, one structure is promoted. An aggressive pre-treatment lead to the growth of a core-shell structure of SiC nanofibers. The core is constituted of [bêta]-SiC and the shell of carbon. The originality of this process resides in the fact that the silicon source to grow these nanofibers is the substrate itself. Secondly, the control of the nanostructuration and the patterning of iron catalyst film was studied. The effect of the hydrogen plasma conditions on the diameter and the density of the catalyst nanoparticles was studied and discussed. We were then able to propose a comprehensive mechanism for the metallic nanostructuration. The growth of carbon nanotubes (CNTs) was than carried out on the patterned catalyst nanoparticles. The plasma parametric study revealed the effect of the plasma power and pressure as well as the methane gas ratio on the quality and structure of the produced CNTs. A corrolation of the catalyst thickness and the CNTs diameters has been demonstrated. High quality double-walled and multi-walled CNTs of a diameter of about 1 nm have than been obtained. Besides, we have noted the gowth of carbon nanowalls for relatively long pre-treatment times.
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https://hal.univ-lorraine.fr/tel-01748309
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Submitted on : Thursday, March 29, 2018 - 11:31:17 AM
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Sandra Rizk. Elaboration et caractérisation de nanostructures carbonées par procédé CVD assisté par plasma microonde. Autre [cond-mat.other]. Université Henri Poincaré - Nancy 1, 2009. Français. ⟨NNT : 2009NAN10089⟩. ⟨tel-01748309⟩

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