Électrogénération sol-gel de films minces siliceux mésostructurés : méthylation, variations structurales, contrôle morphologique et microlithographie

Abstract : Thanks to an Electro-Assisted Self-Assembly (EASA) cooperative process, the sol-gel electrogeneration of silica thin films from sols containing alkoxysilanes and cationic surfactant molecules (cetyltrimethylammonium: CTAB) allows to obtain mesostructured films exhibiting mesopore channels orthogonal to the substrate. Organized methylated silica thin films with "vertically"-aligned mesopores were electrogenerated by performing a one-step co-condensation between alkoxysilanes and organo-alkoxysilanes in the presence of CTAB. Monitoring mass transport issues inside these thin layers demonstrates that their permeability can be modulated by the -CH3 moieties ratio. The EASA process was then extended to the use of mainly aqueous sols. This permits the electrogeneration of new structures, the control of the porous network orientation and a modulation of the deposited material morphology by changing the CTA+ counter-anion. Various synthesis strategies aiming at increasing the porosity of electrogenerated films were evaluated (use of swelling agents and a triblock copolymer). Some convincing results dealing with the electrogeneration of silica films exhibiting a hierarchical porosity (combination of mesopores with macropores) are also presented. Finally, the last part of this work demonstrates how the EASA process can be applied at the local scale (micrometric) by using a scanning electrochemical microscope as a synthesis tool, thus opening the way to the sol-gel electromicrolithography
Document type :
Theses
Complete list of metadatas

Cited literature [185 references]  Display  Hide  Download

https://hal.univ-lorraine.fr/tel-01749634
Contributor : Thèses Ul <>
Submitted on : Thursday, March 29, 2018 - 12:21:48 PM
Last modification on : Thursday, May 24, 2018 - 10:32:01 AM
Long-term archiving on : Friday, September 14, 2018 - 9:21:42 PM

File

DDOC_T_2012_0249_GUILLEMIN.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : tel-01749634, version 1

Citation

Yann Guillemin. Électrogénération sol-gel de films minces siliceux mésostructurés : méthylation, variations structurales, contrôle morphologique et microlithographie. Autre. Université de Lorraine, 2012. Français. ⟨NNT : 2012LORR0249⟩. ⟨tel-01749634⟩

Share

Metrics

Record views

13

Files downloads

27