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Réalisation d'un dépôt photocatalytique de dioxyde de titane à basse température avec une torche plasma à la pression atmosphérique

Abstract : This PhD work deals with the deposition of photocatalytic thin films of titanium dioxide at low temperature in the post-discharge of an atmospheric pressure plasma process. The main objective is the development of a low cost route for the deposition of self-cleaning coatings on 3D thermosensitive substrates. The deposited coatings present good photocatalytic properties which origin is firstly investigated. The elemental composition, the growth mechanisms and the crystallinity of three series of coatings corresponding to three different deposition temperatures are studied. The high specific surface of the coatings, due to the growth of agglomerates, appears to be the main parameter responsible for such photocatalytic properties. But these agglomerates are also responsible for the poor mechanical properties of the coatings as their adhesion decreases with their size. These agglomerates are formed in gas phase in recirculation loops and develop through multiple phenomena: CVD growth, agglomeration at the surface of the coating and redeposition due to the influence of the post-discharge on the surface of the coating. Moreover, at a given precursor flow rate, their number and their size are interlocked. Thus, with the aim of optimizing the deposition process, the control of the formation of such structures through the decrease of the precursor flow rate, the power input and the gas flows are mandatory and are a perspective of this PhD work
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https://hal.univ-lorraine.fr/tel-01750667
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  • HAL Id : tel-01750667, version 1

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Sébastien Olivier. Réalisation d'un dépôt photocatalytique de dioxyde de titane à basse température avec une torche plasma à la pression atmosphérique. Autre [cond-mat.other]. Université de Lorraine, 2014. Français. ⟨NNT : 2014LORR0007⟩. ⟨tel-01750667⟩

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