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Préparation de films minces de céramiques (BN, TiO2) par ablation laser : corrélations entre paramètres d'élaboration et caractéristiques

Abstract : The purpose of this work is to determine the experimental conditions of laser ablation of titanium oxide (TiO2) and boron nitride (BN) ceramics in order to elaborate thin films on various substrates. Chapter one constitutes a recall of the studied ceramics characteristics as well as the different processes to elaborate thin films and more particular the laser ablation deposition technique. Such technique is related to the related to the laser-matter interactions. The next part develops the experimental sight related to, on the one hand to the films elaboration and classical techniques of physical chemistry characterizations, and on the other hand to the microplasma studied by laser microprobe coupled to mass spectrometry. The last chapter, devoted to the experimental results, displays firstly the synthesis of amorphous and non stoichiometric titanium oxide films deposited on polyethylen terephthlate. Secondly the preparation of amorphous boron nitride films on silicon. The study of these two kinds of products is carried out on the target transformation by laser beam depending notably to the wavelength and the photonic power. Then, the elaboration of the films and their characterization by different techniques are described, more particularly by using X-ray photoelectrons spectroscopy and laser desorption coupled to mass spectrometry. More especially for boron nitride target, Fourier transform mass spectrometry (FTMS) technique shows a favourable effect of the 248 nm laser wavelength irradiation. Contrary to other wavelengths, the 248 nm photons assist the formation of BnNn-1 clusters in a laser power scale more important
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  • HAL Id : tel-01776919, version 1



Nadine Lobstein. Préparation de films minces de céramiques (BN, TiO2) par ablation laser : corrélations entre paramètres d'élaboration et caractéristiques. Matière Condensée [cond-mat]. Université Paul Verlaine - Metz, 1995. Français. ⟨NNT : 1995METZ018S⟩. ⟨tel-01776919⟩



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