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Détermination des fonctions de distribution des flux des espèces neutres et ionisées en procédé HiPIMS et corrélations avec les couches minces de type TiN déposées

Abstract : The growth of thin layers in reactive-direct current magnetron sputtering (R-DC) and reactive-high power impulse magnetron sputtering (R-HiPIMS) processes is the general framework of this PhD. Reactive processes consist in the addition, in argon gas, of a reactive gas such as oxygen or nitrogen, and allow the deposition of oxides and nitrides which have many industrial applications. Nevertheless, the high level of expectations regarding new applications requires a better understanding, controlling, mastering of basic processes governing atoms transport in the view of process optimization. The main goal of this PhD is to study the transport of sputtered titanium atoms (Ti) in Ar/N2 gas mixture and to establish correlations with TiN film properties. Tunable diode laser induced fluorescence technique (time resolved in the case of HiPIMS process) has been developed in order to measure velocity distribution functions of neutral Ti atoms at the ground state, function of the pressure, the distance from the target and the gas mixture. In HiPIMS, the additional degree of freedom, given by time dimension, allowed to characterize their kinetic of transport while at the same time providing the possibility to separate characteristic time scales of different processes. Three atoms populations have been highlighted (energetic, quasi-thermalized and thermalized ones). Energy distribution functions of Ti+ ions have been measured using mass spectrometry and four populations have been observed and explained. Finally, deposited thin films have been analyzed by means of SEM, XRD and electron microprobe methods.
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https://hal.univ-lorraine.fr/tel-02351136
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Submitted on : Monday, June 22, 2020 - 2:18:58 PM
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  • HAL Id : tel-02351136, version 1

Citation

Abderzak El Farsy. Détermination des fonctions de distribution des flux des espèces neutres et ionisées en procédé HiPIMS et corrélations avec les couches minces de type TiN déposées. Physique [physics]. Université de Lorraine, 2019. Français. ⟨NNT : 2019LORR0085⟩. ⟨tel-02351136⟩

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