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Accurate calibration and optimized measurement: use of an achromatic compensator in rotating polarizer spectroscopic ellipsometry

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https://hal.univ-lorraine.fr/hal-02900571
Contributor : Laurent Broch <>
Submitted on : Thursday, July 16, 2020 - 11:24:18 AM
Last modification on : Friday, July 17, 2020 - 3:17:13 AM

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L. Broch, A. En Naciri, L. Johann. Accurate calibration and optimized measurement: use of an achromatic compensator in rotating polarizer spectroscopic ellipsometry. Thin Solid Films, Elsevier, 2004, 455-456, pp.61-65. ⟨10.1016/j.tsf.2003.11.202⟩. ⟨hal-02900571⟩

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