Abstract : In real-time measurement, it is difficult to reduce systematic errors on spectra of ellipsometric angles Ψ and Δ by the mean of two measurements
at two analyzer positions with the incidence plane +45° and -45° [1-2]. Generally, the analyzer is mounted on a motorized rotation stage. The
rotation of the optical component from -45° to +45° requires few seconds, and this is incompatible with dynamic measurements.
https://hal.univ-lorraine.fr/hal-02900842 Contributor : Laurent BrochConnect in order to contact the contributor Submitted on : Thursday, July 16, 2020 - 2:41:32 PM Last modification on : Monday, May 9, 2022 - 11:20:07 AM Long-term archiving on: : Monday, November 30, 2020 - 11:18:47 PM