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Poster Communications Year : 2013

Real-Time ellipsometric spectra without systematics errors

Abstract

In real-time measurement, it is difficult to reduce systematic errors on spectra of ellipsometric angles Ψ and Δ by the mean of two measurements at two analyzer positions with the incidence plane +45° and -45° [1-2]. Generally, the analyzer is mounted on a motorized rotation stage. The rotation of the optical component from -45° to +45° requires few seconds, and this is incompatible with dynamic measurements.
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Dates and versions

hal-02900842 , version 1 (16-07-2020)

Identifiers

  • HAL Id : hal-02900842 , version 1

Cite

Laurent Broch, Nicolas Stein, Alexandre Zimmer, Yann Battie, Aotmane En Naciri. Real-Time ellipsometric spectra without systematics errors. ICSE-6, 2013, Kyoto, Japan. 2013. ⟨hal-02900842⟩
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