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Poster communications

Real-Time ellipsometric spectra without systematics errors

Abstract : In real-time measurement, it is difficult to reduce systematic errors on spectra of ellipsometric angles Ψ and Δ by the mean of two measurements at two analyzer positions with the incidence plane +45° and -45° [1-2]. Generally, the analyzer is mounted on a motorized rotation stage. The rotation of the optical component from -45° to +45° requires few seconds, and this is incompatible with dynamic measurements.
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Poster communications
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Submitted on : Thursday, July 16, 2020 - 2:41:32 PM
Last modification on : Monday, May 9, 2022 - 11:20:07 AM
Long-term archiving on: : Monday, November 30, 2020 - 11:18:47 PM


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  • HAL Id : hal-02900842, version 1


Laurent Broch, Nicolas Stein, Alexandre Zimmer, Yann Battie, Aotmane En Naciri. Real-Time ellipsometric spectra without systematics errors. ICSE-6, 2013, Kyoto, Japan. 2013. ⟨hal-02900842⟩



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