Elaboration of high-transparency ZnO thin films by ultrasonic spray pyrolysis with fast growth rate
Résumé
In this work, ZnO films are deposited by the ultrasonic spray pyrolysis technique on soda lime glass substrates by following a specific design of experiment. The ZnO films are spray deposited using different elaboration parameters. Optical, morphological, structural and electrical properties of the ZnO films are systematically investigated. Fourier-transform infrared and transmittance spectra are measured to examine their optical properties. They are correlated to their structural properties determined by X-ray diffraction and Raman spectroscopy. The surface morphology is analyzed using atomic force microscopy while the electrical conductivity is measured using the four probe technique. This comprehensive analysis shows that ZnO thin films elaborated using ultrasonic spray pyrolysis with fast growth rate have a high transparency in a wide thickness range, making them suitable for use in applications such as all-oxide solar cells.