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Contribution à l'élaboration de capteurs sans-fil, opérant à très haute température (500-1000º), à base de dispositifs à ondes élastiques de surface : choix des matériaux constitutifs

Abstract : Surface acoustic waves devices are key components of telecommunication systems for more than thirty years or so. Because they are passive and very sensitive to external conditions, they also offer the possibility to make autonomous wireless sensors (electronic-less and battery-less), which could be particularly interesting in high-temperature environments. Our work was focused on the choice of materials allowing the fabrication of such sensors for both parts of the device: piezoelectric substrate and metallic electrodes. The latter are generally made of platinum because of the great chemical inertness of this noble metal. Our work allowed us to attribute their degradation, starting around 700°C on, to a phenomenon called agglomeration which is very specific to thin films. This result led us to consider and test more efficient solutions. Regarding the substrate, we mainly studied AlN/Sapphire bilayer structure, promising for such applications but not really studied yet. After the optimization of the deposition parameters of the thin film, realized by reactive magnetron sputtering, leading to the epitaxial quality, we studied the strength of AlN to oxidation under high temperature in air atmosphere. Results given by X-ray diffraction, ellipsometry and secondary ion mass spectroscopy converged to show that AlN/Sapphire structure is a good candidate for such applications at temperatures up to 700°C
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https://hal.univ-lorraine.fr/tel-01746357
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Thierry Aubert. Contribution à l'élaboration de capteurs sans-fil, opérant à très haute température (500-1000º), à base de dispositifs à ondes élastiques de surface : choix des matériaux constitutifs. Autre [cond-mat.other]. Université Henri Poincaré - Nancy 1, 2010. Français. ⟨NNT : 2010NAN10114⟩. ⟨tel-01746357⟩

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