Plasmas micro-ondes d'argon à la pression atmosphérique : diagnostics et applications au nettoyage de surfaces

Abstract : The present work deals with the study of argon microwave plasmas generated in resonant cavity at atmospheric pressure and their application to surface cleaning. First, a study of the aim of surface cleaning of industrial surfaces is presented, followed by a state of the art of existing solutions and their limitations, showing the interest of plasmas as an alternative, especially atmospheric pressure microwave resonant cavity plasmas. In the case of argon, these plasmas have the particularity to be inhomogeneous and constituted of one or many small diameter filaments, depending on experimental conditions. The study of the filamentation of these discharges is the subject of the second chapter. In the case of one filament, correlations have been evidenced between its size, its temperature and the dissipated power. A simple electromagnetic simulation allowed us to describe the influence of the main plasmas parameters on the filamentation process. The third chapter presents results from the characterisation of a single argon filament by the mean of diode laser absorption in continuous and pulsed plasma mode. The effect of oxygen addition is also studied. The last chapter deals with the study of the use of atmospheric pressure microwave post-discharges in argon-nitrogen or argon-oxygen mixtures for surface cleaning application. We studied the interaction of such post-discharges with model organic molecules (stearic acid and 1-octadecene). Surface analyses by the mean of extreme surface analysis techniques based on mass spectrometry (ToF-SIMS and FTMS) allow us to improve our understanding of cleaning mechanisms
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Cédric Noël. Plasmas micro-ondes d'argon à la pression atmosphérique : diagnostics et applications au nettoyage de surfaces. Autre. Institut National Polytechnique de Lorraine, 2009. Français. ⟨NNT : 2009INPL020N⟩. ⟨tel-01748755⟩

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