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Propriétés mécaniques de membranes d'épaisseur nanométriques : construction et mise au point d'un essai de gonflement

Abstract : A new mechanical testing device of free standing membranes by Bulge Test has been built at Institute Jean Lamour in order to investigate the mechanical properties of thin films of nanometric thickness. The Bulge Test measures the deflection of a free standing membrane to which a differential atmospheric pressure has been applied. (The specimens are prepared from film on substrate deposits by cutting a window within the substrate by standard microelectronic techniques.) We aim of achieve tests from room temperature to ~ 900°C. The main technical difficulty met during this work was to develop a non perturbating method of measurement of the film bulge. Two different techniques were tested: point measurement and 2D interferometry using a spherical reference. The first technique, however simple, was difficult to practice, especially in the case of buckling membranes. The second method required a detailed analysis of the whole optical system (image distorsion, calculation of interferograms) leading to a simple measurement method, suitable for integration in the acquisition and command chain of the device, followed by an off line full treatment.The operating method was used on two different sets of specimens: fragile silicon nitride and silicon membranes in order to test the reproducibility of the device. Polycrystalline gold thin films were then used to study the early stage of plastic strain
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Audrey Hemel. Propriétés mécaniques de membranes d'épaisseur nanométriques : construction et mise au point d'un essai de gonflement. Autre. Institut National Polytechnique de Lorraine, 2010. Français. ⟨NNT : 2010INPL060N⟩. ⟨tel-01748891⟩

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