Microplasma micro-ondes en cavité résonnante à la pression atmosphérique : caractérisation et application à la nanostructuration de surface

Abstract : In order to always go to the smallest, a plasma reactor microwave in resonant cavity operating at atmospheric pressure was developed at the Institut Jean Lamour (IJL, UMR 7198) in the team ESPRITS (Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces).This plasma reactor has the particularity to provide post-discharge of small size (about one millimeter). An Ar-O2 gas is used as the plasma component. The filamentous appearance of this type of plasma is a major feature of the device. Furthermore, the afterglow is notably composed of atomic oxygen, active species such as widely used PECVD or surface functionalization.Our job was to develop the plasma reactor and to characterize the resulting afterglow. After mastering the key parameters that can play on the particular shape of the afterglow, we were interested in its use as a plasma source for surface treatment applications.We studied deposition of SiOx thin films from hexamethyldisiloxane (HMDSO) using post-discharge source of atomic oxygen for the decomposition of the organosilicon precursor. The HMDSO is used here because it is fairly easy to handle and it has often been studied, allowing us to obtain much information on him. Various self-organized structures appeared in these deposits and have been investigated to understand their formation mechanism
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Grégory Arnoult. Microplasma micro-ondes en cavité résonnante à la pression atmosphérique : caractérisation et application à la nanostructuration de surface. Autre. Institut National Polytechnique de Lorraine, 2011. Français. ⟨NNT : 2011INPL008N⟩. ⟨tel-01748921⟩

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