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Élaboration de films nanocomposites hybrides P(VDF-TrFE)/nanocristaux, et intégration dans des dispositifs microstructurés

Abstract : The objective of this work is to develop flexible organic/inorganic hybrid materials for application in microsystems. This study included the preparation and characterization of nanocomposites based on ferroelectric polymer matrix P(VDF-TrFE), potential materials for applications based on thin films on substrates, and different types of nanoparticles: ZnO, LiNbO3 (piezoelectric) and Al2O3 (non-piezoelectric). The protocols of the ultrasonic dispersion of nanoparticles in solvents and polymeric solutions are optimized, allowing dispersing quite homogeneously clusters of nanocrystals in the matrix copolymer. Films of controlled thickness between 0.1 µm and 100 µm were fabricated by spin-coating and doctor blade coating with surface quality suitable for micro-technologies. Morphology and crystallinity of P(VDF-TrFE) are preserved in the presence of up to 10 wt.% of nanoparticles. Thus nanocomposites keep high piezoelectric properties and show an increased up to 30% of the mechanical properties for 10 wt.% ZnO or Al2O3. In addition, the increase in elastic constant with decreasing cluster size of nanoparticles was observed. Nanocomposite films on substrates or free-standing filled up to 10 wt.% were successfully polarized by corona without contact. Specific procedures for preparing microdevices by photolithography on nanocomposite polymer films, while keeping piezoelectric activities of materials, have been developed. The characterization of realized acoustic wave devices is also presented
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https://hal.univ-lorraine.fr/tel-01749236
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  • HAL Id : tel-01749236, version 1

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van Son Nguyen. Élaboration de films nanocomposites hybrides P(VDF-TrFE)/nanocristaux, et intégration dans des dispositifs microstructurés. Autre [cond-mat.other]. Université de Lorraine, 2012. Français. ⟨NNT : 2012LORR0075⟩. ⟨tel-01749236⟩

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