Mise au point de la fluorescence induite par diode laser résolue en temps : application à l'étude du transport des atomes de tungstène pulvérisés en procédé magnétron continu ou pulsé haute puissance

Abstract : Magnetron sputter deposition is an established and widely used method for the growth of thin films. Nevertheless, the high level of expectations regarding new applications require a better understanding, controlling, mastering of basic processes governing atoms transport in the view of process optimization. This work consist in the study of transport of sputtered W atoms in direct current and high power impulse magnetron discharges (DC and HiPIMS). A tunable diode laser induced fluorescence technique (TD-LIF) has been developed, in order to measure W sputtered atom velocity distribution function. Measurements were calibrated using laser absorption and were corroborated by deposition rate. In DC, the study of the influence of discharge parameters (power, voltage, Ar/He gas mixture, and distance from target, etc.) highlighted spatial evolution of different regimes of transport: ballistic (energetic atoms), diffusive (thermalized atoms), and mixed (ballistic + diffusive). In HiPIMS, pulsed plasma required to develop a time resolved TD-LIF technique (TR-TDLIF). The additional degree of freedom, given by time dimension allowed for a better understanding of mixed transport which represents the most complicated situation. This technique allowed to measure the kinetic of sputtered W atoms while at the same time providing the possibility to separate characteristic time scales of different processes
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  • HAL Id : tel-01752030, version 1

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Mikaël Désécures. Mise au point de la fluorescence induite par diode laser résolue en temps : application à l'étude du transport des atomes de tungstène pulvérisés en procédé magnétron continu ou pulsé haute puissance. Autre [cond-mat.other]. Université de Lorraine, 2015. Français. ⟨NNT : 2015LORR0137⟩. ⟨tel-01752030⟩

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