Élaboration de films minces de borates par MOCVD-injection pour des applications en optique non linéaire

Abstract : Thin films of nonlinear optical (NLO) material provide excellent prospects for integrated optical applications requiring UV waveguides. Among the family of NLO borate compounds, barium metaborate (BBO) is particularly attractive because it has a variety of favourable properties such as a wide optical transmis- sion range, rather large nonlinear optical coefficients and a high damage thre- shold. The main objective of the present work was the growth and characterization of BBO thin films by injection metal organic chemical vapour deposition (injection-MOCVD). This method is based on the computer-controlled injection of micro amounts of a solution into an evaporator system. There, the solution containing precursors dissolved in an appropriate solvent is flash vaporised. Thin films were deposited with a molar composition from boron rich (Ba :B=1 :56) to stoichiometric (Ba :B=1 :2) and different growth temperatures and characte- rised by several methods (optical microscopy, micro-Raman spectroscopy, XPS, FTIR). The best BBO layers were obtained for Ba :B=1 :2 molar ratio and for a growth temperature of around 700 C. The successful growth of BBO was confirmed by micro-Raman and XPS analysis.
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Sandra Wersand-Quell. Élaboration de films minces de borates par MOCVD-injection pour des applications en optique non linéaire. Autre [cond-mat.other]. Université Paul Verlaine - Metz, 2006. Français. ⟨NNT : 2006METZ009S⟩. ⟨tel-01752460⟩

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