Caractérisation, modèlisation et synthèse de films minces de nitrure de bore (BN) par dépôt chimique en phase vapeur assisté par plasma (PECVD)

Abstract : Boron nitride (BN) is a compound that exists under two crystallographic structures, the hexagonal form (h-BN), and the cubic form (c-BN). The latter one is a very valuable material for applications in optics and electronics. The first part of this work, was to study the deposition of thin films of boron nitride in a microwave plasma enhanced chemical vapor deposition (PECVD) reactor, and in particular to study how to synthesize the cubic phase. For that purpose, it is necessary to optimize the ionic bombardment, and for that aim, an RF signal was applied to the sample holder, to polarize it by self bias effect. In order to get a control on it, we did perform some characterisations of the plasma properties by Langmuir probe measurements. The second part was to characterize the deposited layers by infra-red transmission spectroscopy. It appears that the films of h-BN are nanocrystallized and texturated, the orientation of the optical axis of the crystallites being dependent on the deposition conditions. In order to simulate the spectra, we have developed an optical model of thin films transmission, and we have used it to determine the optical parameters of h-BN, by fitting the experimental spectra. The optical behavior of films is modelized thanks to the expression of the dielectric function of the medium, which has been expressed, on the one hand, by an expression of the effective dielectric function of the literature, and on the other hand, by an iterative calculation which we have developed
Complete list of metadatas

Cited literature [71 references]  Display  Hide  Download

https://hal.univ-lorraine.fr/tel-01752473
Contributor : Thèses Ul <>
Submitted on : Thursday, March 29, 2018 - 1:49:01 PM
Last modification on : Tuesday, April 10, 2018 - 1:26:58 AM

File

Eliaoui.Mourad.SMZ0605.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : tel-01752473, version 1

Collections

Citation

Morad Eliaoui. Caractérisation, modèlisation et synthèse de films minces de nitrure de bore (BN) par dépôt chimique en phase vapeur assisté par plasma (PECVD). Autre [cond-mat.other]. Université Paul Verlaine - Metz, 2006. Français. ⟨NNT : 2006METZ005S⟩. ⟨tel-01752473⟩

Share

Metrics

Record views

28

Files downloads

39