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Elaboration et caractérisation de couches mince d'oxydes métalliques pour la détection de gaz polluants atmosphériques

Abstract : The demand of simple, small, low cost and performing gas sensors for the detection of pollutant gases is of great interest taking into consideration the health and environmental problems. For this purpose we decided to develop thin films of metal oxide semiconductors which present a good affinity to many pollutant gases, but, which, however present a problem of cross-sensitivity and, additionally, which must work at elevated temperatures. These thin films (SnO2, Cu-doped SnO2, WO3, In2O3, Sn-doped In2O3 and ZnO) have been deposited on Pt- partially coated alumina using a novel innovative technique, i.e., Electrostatic Spray Deposition allowing easy deposition parameter (temperature, flow rate, time etc.) variation. Homogeneous, nano-structured films with desired porous morphology have been obtained as revealed by Scanning Electron Microscopy and Transmission Electron Microscopy techniques. The microstructure studied using Energy Dispersive X-ray Analysis, X-ray Diffraction respectively Raman spectroscopy methods showed that we have successfully obtained the desired crystallinity and a good purity of the films for gas sensor use. The sensing performance of the films to different oxidizing and reducing pollutant gases (H2S, SO2 and NO2) has been yet evaluated. From all the studied films, the 1% Cu-doped SnO2 ones proves to be the most sensitive for the detection of H2S at low operating temperatures and furthermore present no cross-sensitivity for the two other gases. WO3 films presents the highest sensitivity to NO2 at 150°C compared with all the other composition films, but unfortunately the NO2 response interferes with the H2S response. To avoid this ambiguity, we can use ZnO films, which present a very high sensitivity to NO2 compared to SO2 and H2S response. Additionally, all the films were almost insensitive to SO2. On the base of these results we can propose the conception of a competitive miniaturized sensor array dedicated to detect and to quantify a H2S/NO2 mixture
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Camelia Ghimbeu. Elaboration et caractérisation de couches mince d'oxydes métalliques pour la détection de gaz polluants atmosphériques. Sciences de la Terre. Université Paul Verlaine - Metz, 2007. Français. ⟨NNT : 2007METZ050S⟩. ⟨tel-01752681⟩

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